Piezo - Piezo Mechanisms & Piezo Mechanics, Piezoelectric Engineering



Piezo Mechanisms, Piezoelectric Transducers, Piezo Mechanics Engineered for Motion, Sensing and Dispensing

Piezoelectric mechanisms can provide very fast and precise motion. Piezoelectric Transducers can also be used for sensing, ultrasound generation and medical applications. PI and PI Ceramic are the leading manufacturers of piezoelectric mechatronic systems such as piezoelectric actuators, pzt transducers for motion control, nano positioning and industrial applications, e.g. in Semiconductors; Bio Tech & Mecial Engineering; Lasers, Optics, Microscopy; Aerospace Engineering;Precision Machining; Astronomy and Microsystems Technology.

PI also provides value added manufacturing and custom assembly of piezoelectric components for OEMs.

Piezo Mechanisms Catalog

Piezoelectric Products for Motion Control:

Piezo Stages, Flexure Guided

Linear Piezo Motors

Piezo Actuators

Piezo Tip/Tilt Steering Mirrors

Piezo Controllers

DuraAct™ Patch Transducers

Piezo Catalogs / Papers
Piezo Mechanisms & Controllers
Vacuum & Non Magnetic Positioners
Piezo Materials & Components
Piezo Flexure Actuators
Piezo Stages for AFM
Piezo Amplifiers, Drivers
Energy Harvesting
Piezo Reliability Paper

Piezo University: Designing with Piezo Mechanics

Different Types of Piezo Mechanisms Solve Different Problems

Not all piezo actuators and motors are created equal. There are a large variety of different designs optimized for different applications, from extremely high force or microsecond response, to long travel ranges in the millimeter and centimeter range.


Direct Piezo Actuators: Z-Stacks, Shear (X, XY) Highest Force Fastest Response Travel Ranges 2-100 ïµm		Piezo Flexure Lever Actuators Flexure Guiding System Response <1 msec Travel to 2 mm, Compact

Ultrasonic Linear Motors Long Travel (10s of millimeters) Fast: 350 mm/sec Low Profile, Self Locking		PiezoWalk Linear Motors High Force (2 kg to 80 kg) Compact, Self Locking Long Travel (10s of millimeters)
All: Sterile, Low Power, No Lubricants, Non- Magnetic, Vacuum Compatible; High Resolution: Sub-Nanometer to Sub-Micron

Piezoelectric Effect /Different Types of Piezo Actuators / Video

Piezoelectric Actuator Tutorial
		Piezo is derived from the Greek word piezein (to squeeze). It is quite often misspelled peizo. Piezoelectric actuators offer a solution to positioning tasks that require the highest accuracy, speed and resolution. Examples given in this tutorial indicate a selection of the many applications common today. The relentless push for more accuracy and speed-whether in biotechnology / nanotechnology, the miniaturization of microelectronics, fiber optics or data storage devices-drives both the application and the further development of piezo technology. Piezo BLOG Tutorial: Piezoelectrics in Nanopositioning, Designing with Piezoelectric Actuators Features and Applications Fundamentals of Piezomechanics, Actuators and Sensors Fundamentals of Piezoelectric Actuators Control of Piezo Actuators and Stages Parallel and Serial Kinematics, PMN Compared to PZT

Piezoelectric / Motorized Actuator Solutions for Motion Control Applications


Nano-Precision Piezo Actuators Forces to 100 kN Sub-Nano meter Resolution Fast Response (to ïµsec -Range) Extreme Lifetime	Ultrasonic Piezo Linear Actuators / Motors Non Magnetic Velocity to 600 mm/s Unlimited Travel Range Forces to 30 N Resolution to 50 Nanometer	Flexible Piezoelectric Patch Transducers Actuator, Sensor, Energy Source Highly Formable Ceramics Can be Applied to Curved Surfaces Cost-Effective	Piezo Stepper Linear Motors Non Magnetic Forces to 600 N <1 nm Resolution Auto-Locking PiezoWalk Principle Travel to 20 mm	Flexure-Guided Piezo Actuators Sub-Nanometer Resolution Fast Response (msec -Range) Excellent Guiding Precision Travel to 1 mm

Piezo Stepping Linear Actuators & Motors (NEXACT / NEXLINE)
N-310 NEXACT^® OEM Miniature Linear Motor/Actuator
		20 mm Standard Travel Range, Flexible Choice of the Runner Length Compact and Cost-Effective Design 0.03 nm Resolution**To 10 N Push/Pull Force Low Operating Voltage Self-Locking at Rest, No Head Dissipation, Nanometer Stability Non-Magnetic and Vacuum-Compatible Working Principle

Specs/Order Info
N-310 Miniature Piezo Linear Motor

N-381 NEXACT^® Linear Actuator, Manipulator, Piezo Stepper
		Travel Range 30 mm Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution Very High Acceleration, e.g. for Cell Penetration Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution** Up to 10 N Force Generation Self-Locking at Rest, no Heat Generation Smooth Motion, no Closed-Loop Jitter Vacuum-Compatible and Non-Magnetic Versions

Specs/Order Info
N-381 Piezo Stepper Manipulator

NEXLINE^® Nanopositioning Actuators

N-111 NEXLINE^®OEM High Force Piezo Motor with Long Travel
		Winner of the SEMI Technology Innovation Showcase Award 3 mm Travel Range <0.1 Nanometer Resolution Active Force Generation to 30 N >50 N Holding Force Self-Locking Non Magnetic Option

Specs/Order Info
N-111 High Force Piezo Motor

N-216 NEXLINE^® High-Load Piezo Nanopositioning Actuator
		Travel Range 20 mm Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop Up to 800 N Holding Force Self-Locking at Rest Non-Magnetic and Vacuum-Compatible Working Principle Cleanroom Compatible

Specs/Order Info
N-216 High-Load Piezo Nanopositioning Actuator

Ultrasonic Linear Actuators / Motors

M-663 PILine Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
		Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder 20 mm Travel To 500 mm/s fast Acceleration to 20 g Resolution to 100 Nanometer Direct-Metrology: Linear Encoder AutoLocking Design XY-Stage Combinations 20000 h MTBF Vacuum Versions Available Non Magnetic Option

Specs/Order Info
M-663 Closed-Loop Translation Stages

Stick-Slip Inertial Piezo Motors

Q-521 Mini Linear Stage with Stick-Slip Inertial Motor
		Travel Range up to 32mm Resolution to 1 Nanometer Self-Locking XY-and XYZ Combinations and Available Rotation Stages Available Non Magnetic Option

			Miniature Stages Product Family: Video, Specs & Order Info Mini Linear and Rotary Stages with Piezo Stick-Slip Motor
Back to Top

Flexure Piezo Actuators (Long Travel, Fast Response, Guided Motion)
P-601 PiezoMove Piezo Flexure Z-Actuator
		Flexure Guidance for Frictionless, Ultra-Straight Motion Travel Ranges to 480 Microns Resolution to 0.2 Nanometer High Stiffness & Dynamics Long Life PICMA Multilayer Piezo Ceramics Open and Closed-Loop Versions Ideal for OEM Applications

Specs/Order Info
P-601 Piezo Flexure Z-Actuator

P-602 High Force Piezo Flexure Actuator
		Backlash-Free, Frictionless Flexure Guides for Straight Motion Integrated Motion Amplifier for Travel Ranges to 1 mm High Dynamics and Stiffness, Forces to 400 N, Long Life PICMA Multilayer Piezo Ceramics Position Sensor Option Custom Designs: Larger Travel, Faster Response, Non-Magnetic OEM-Applications in Adaptronics, Biotechnology or Microfluidics

			Specs/Order Info P-602 High Force Piezo Flexure Actuator
Back to Top

P-603 Low Cost Piezoelectric Flexure Actuator
		Zero Backlash, Frictionless, High-Precision Flexure Guiding System Travel Ranges to 500 ïµm Cost-Effective & Long Life PICMA Multilayer Piezo Ceramics Position Sensor Option Custom Designs: Larger Travel, Faster Response, Non-Magnetic OEM-Applications in Adaptronics, Biotechnology or Microfluidics

			Specs/Order Info P-603 Low Cost Piezo Flexure Actuator
Back to Top

P-753 LISA Closed-Loop Piezoelectric Nano Positioning Stages / Actuators with Direct Metrology
		Unique Design: Both Stage and Actuator Frictionless Precision Flexure Guiding System 0.05 Nano meter Resolution Direct Metrology with Capacitive Sensors for Highest Precision Ultra-Fast Response, Very Compact Long Life PICMA Multilayer Piezo Ceramics ID-Chip for Auto Calibrate Function Vacuum Versions Available

Specs/Order Info
P-753 Piezoelectric NanoPositioning Stage

Direct Piezoelectric Linear Actuators & Piezo Benders
P-882 - P-888 PICMA High-Performance Multilayer Piezo Stacks
		Award-Winning Low-Voltage Technology Superior Lifetime Under Extreme Conditions Very Large Operating-Temperature Range High Humidity Resistance Excellent Temperature Stability High Stiffness UHV Compatible to 10-⁹ hPa Sub-Millisecond Response & Sub-Nano meter Resolution

			Specs/Order Info P-882 - P-888 High-Performance Piezo Stacks
Back to Top

P-212, P-216 & P-225, P-235 Preloaded Encased PICA Power Piezoelectric Stacks
		Pushing Force to 4,500 N or 30,000 N Travel Range to 180 ïµm Pulling Force to 500 N or 3,500 N Sub-millisecond Response Sub-Nanometer Resolution Options: Vacuum, High- and Low-Temperature

	P-212 - P-216 PDF		Specs/Order Info / Order Info P-212 - P-216 Preloaded Encased Piezo Stacks
	P-225 - P-235 PDF		Specs/Order Info / Order Info P-225 - P-235 Preloaded Encased Piezo Stacks

P-840 Preloaded Low-Voltage Piezoelectric Stack Linear Actuators (LVPZT)
		Displacement to 90 ïµm Pushing Forces to 1000 Newton Preloaded for Tensile Forces to 50 N Sub-millisecondec Response Sub-Nano meter Resolution Options: Ball Tip, Vacuum Versions

			Specs/Order Info P-840 - P-841 Piezo Stack Linear Actuators
Back to Top

PICMA- Chip Piezoelectric Stacks: Miniature Low-Voltage Actuators
		Ceramic Encapsulation for Extended Lifetime Smallest Multilayer Piezo: from 2x2x2 mm Low-Voltage, High Curie Temperature Ideal for Dynamic Operation Sub-Millisecond Response / Sub-Nanometer Resolution UHV Compatible to 10^-9 hPa Superior Lifetime

			Specs/Order Info PL022 - PL033 - PL055 Mini Piezo Chip Stacks
Back to Top

P-007 - P-056 PICA Stack / High-Force Piezoelectric Stacks
		High Load Capacity to 100 kN High Force Generation to 80 kN Large Cross Sections to 56 mm Diameter Variety of Shapes Extreme Reliability >1000,000,000 Cycles Proven and Flexible Design Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time Vacuum-Compatible Versions

Specs/Order Info
P-007 - P-056 High Force Piezo Stacks

P-871 Closed-Loop, Multilayer Piezoelectric Bender Transducer, High-Deflection & Low-Voltage
	Closed-Loop = Higher Accuracy Nanometer-Range Resolution Deflection up to 1.6 mm Ceramic Insulation for Extended Lifetime Ideal for Scanning Applications Vacuum-Compatible Versions Low Voltage Mounting Hardware Included Special Controllers / Drivers Available

Specs/Order Info
P-871 Piezo Bender Transducer

P-876 DuraAct™ Flexible Piezoelectric Patch Transducer
		Actuator, Sensor or Energy Source Highly Formable Ceramics Can be Applied to Curved Surfaces Customized Solutions on Request Cost-Effective