Piezo mechanisms and piezoelectric motion systems

Piezoelectric Motion, Sensing and Dispensing

Piezo Mechanisms, Piezoelectric Transducers and Piezo Mechanics

Piezo mechanisms provide extremely fast, precise motion and can also be used for sensing, ultrasound generation, dispensing, energy harvesting and medical applications.

Piezoelectric Products for Motion Control

Piezoelectric transducers convert electrical energy directly into mechanical motion. In precision motion systems, this enables nanometer and sub-nanometer positioning, fast response, high force, compact designs and operation without conventional motors, gears or lubricants as is common with traditional motorized linear actuators.

PI and PI Ceramic manufacture piezoelectric mechatronic systems including piezo actuators, PZT transducers, piezo motors, nanopositioning stages and controllers for semiconductor, biotech, medical engineering, lasers, optics, microscopy, aerospace, precision machining, astronomy and microsystems technology.

PI also provides value-added manufacturing and custom assembly of piezoelectric devices for OEMs.

Piezo mechanisms catalog Piezo Mechanisms Catalog

Piezo Product Areas

Piezo Catalogs and Papers

Different Types of Piezo Mechanisms Solve Different Problems

Not all piezo actuators and motors are created equal. Different designs are optimized for high force, microsecond response, long travel, compact motion, high dynamics or incremental motion over millimeter-scale ranges. In general, piezo systems can be direct analog actuators, motion-amplified flexure actuators, or incremental piezo motors with long travel.

Piezoelectric Effect / Different Piezo Actuator Types

Piezoelectric Actuator Tutorial

Piezo is derived from the Greek word piezein, meaning “to squeeze.” Piezoelectric actuators are used for positioning tasks that require very high accuracy, speed and resolution.

The push for higher accuracy and speed in biotechnology, nanotechnology, microelectronics, fiber optics and data storage continues to drive the development of piezo technology.

Piezo actuator tutorial

Piezoelectric / Motorized Actuator Solutions for Motion Control Applications

Piezo technology covers several actuator families. The right choice depends on whether the application requires maximum force, fastest response, long travel, compact self-locking motion, flexible sensing, or frictionless guided nanopositioning.

Piezoelectric / Motorized Actuator Solutions for Motion Control Applications

N-310 miniature piezo linear motor

Piezo OEM Miniature Linear Motor / Actuator

  • 20 mm standard travel range with flexible runner length
  • Compact and cost-effective design
  • Resolution to 0.03 nm
  • Push/pull force to 10 N
  • Self-locking at rest, no heat dissipation
  • Non-magnetic and vacuum-compatible working principle
N-111 high force piezo motor

OEM Mid-Force Piezo Motor

  • 3 mm travel range
  • <0.1 nm resolution
  • Active force generation to 30 N
  • >50 N holding force
  • Self-locking
  • Non-magnetic option
N-216 high-load piezo nanopositioning actuator

NEXLINE High-Load Piezo Nanopositioning Actuator

  • 20 mm travel range
  • Resolution to 0.03 nm
  • Open-loop and closed-loop operation
  • Up to 800 N holding force
  • Self-locking at rest
  • Non-magnetic, vacuum-compatible and cleanroom compatible
M-663 ultrasonic piezo linear motor stage

PILine Miniature Translation Stage with Ultrasonic Piezo Motor

  • Closed-loop linear motor drive with encoder
  • 20 mm travel
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 100 nm
  • Self-locking design
Q-motion mini linear stage with piezo motor

Mini Linear Stage with Stick-Slip Inertial Motor

  • Travel range up to 32 mm
  • Resolution to 1 nm
  • Self-locking
  • XY and XYZ combinations available
  • Rotation stages available
  • Non-magnetic option
P-601 piezo flexure actuator

P-601 PiezoMove Flexure Z-Actuator

  • Flexure guidance for frictionless, ultra-straight motion
  • Travel ranges to 480 microns
  • Resolution to 0.2 nm
  • High stiffness and dynamics
  • Long-life PICMA multilayer piezo ceramics
  • Open- and closed-loop versions
P-602 high force piezo flexure actuator

High Force Piezo Flexure Actuator Custom Design

  • Backlash-free, frictionless flexure guides
  • Integrated motion amplifier
  • Travel ranges to 1 mm
  • Forces to 400 N
  • Position feedback option
P-603 low cost piezo flexure actuator

Low Cost Piezoelectric Flexure Actuator

  • Zero backlash, frictionless flexure guidance
  • Travel ranges to 500 µm
  • Cost-effective and long-life PICMA ceramics
  • Position sensor option
  • Custom OEM designs feasible
  • For biotech, adaptronics and microfluidics
P-753 high precision piezo flexure actuator

Closed-Loop Piezoelectric Nanopositioning Stage / Actuator

  • Stage and actuator in one compact design
  • Frictionless precision flexure guiding system
  • 0.05 nm resolution
  • Direct metrology with capacitive sensors
  • Ultra-fast response
  • Vacuum versions available
PICMA piezo stack actuator

High-Reliability Multilayer Piezo Stacks

  • Award-winning low-voltage technology
  • Superior lifetime under extreme conditions
  • High humidity resistance
  • High stiffness
  • UHV compatible
  • Sub-millisecond response and sub-nanometer resolution
PICA power piezo stack actuator

Preloaded Encased PICA Power Piezo Stacks

  • Pushing force to 4,500 N or 30,000 N
  • Travel range to 180 µm
  • Pulling force to 500 N or 3,500 N
  • Sub-millisecond response
  • Sub-nanometer resolution
  • Vacuum and temperature options
P-840 preloaded piezo stack actuator

Piezo Stack Linear Actuators, Preloaded Medium Force

  • Displacement to 90 µm
  • Pushing forces to 1000 N
  • Preloaded for tensile forces to 50 N
  • Sub-millisecond response
  • Sub-nanometer resolution
  • Ball tip and vacuum options
PICMA chip miniature piezo stack actuator

PICMA Chip Piezoelectric Stacks

  • Ceramic encapsulation for extended lifetime
  • Miniature multilayer piezo stacks from 2 x 2 x 2 mm
  • Low-voltage operation
  • High Curie temperature
  • UHV compatible
  • Ideal for dynamic operation
PICA high-load piezo stack actuator

PICA High-Force Piezo Stacks

  • Load capacity to 100 kN
  • Force generation to 80 kN
  • Large cross sections to 56 mm diameter
  • Variety of shapes
  • Long lifetime
  • Vacuum-compatible versions
P-871 piezo bender actuator

Piezo Bender Transducer

  • Closed-loop option for higher accuracy
  • Nanometer-range resolution
  • Deflection up to 1.6 mm
  • Ceramic insulation for extended lifetime
  • Ideal for scanning applications
  • Low-voltage operation
P-876 DuraAct piezo patch transducer

Flexible Piezoelectric Patch Transducer

  • Actuator, sensor or energy source
  • Highly formable ceramics
  • Can be applied to curved surfaces
  • Customized solutions on request
  • Cost-effective
  • Useful for structural monitoring and active vibration control