Piezo Driver / Nanopositioning Controller /
High-Voltage Amplifier Overview

High-Speed Digital
Piezo Controllers 		3-Channel
Nanocube Controllers		 High-Power Piezo Drivers to 2000W Controllers for Bender
Piezo Actuators		 OEM Piezo Controller
Modules
Modular Piezo Controllers 1- Channel Controllers
Amps & Cards		 Low-& High-Voltage Drivers Controllers for Steering Mirrors Piezo Controller Board

 

Piezo Controllers and Drivers are used to operate piezo mechanisms with high precision and speed. PI offers the largest selection of digital and analog piezo controllers, drivers and high-voltage amplifiers for piezoelectric actuation systems worldwide. Advantages: digital and analog controllers; 100 V and 1000 V amplifiers; modular, OEM and PC-plug-in designs; ultra-low-noise, high-stability servo-controllers; 1W to 6kWpeak power; energy-recovery designs.

Piezo Products:
Piezo Actuators
Piezo Stages
Piezo Linear Motors
Piezo Steering Mirrors
Piezo Controllers
Piezo Patch Transducers

 




Digital Servo Piezo Controllers


E-709 Affordable 1-Channel Digital Piezo Controller & Driver
Product Image - E-709
  • Low-Cost, yet High Performance
  • Fast Digital Controller, Software Configurable Servo Parameters
  • Improves Linearity of SGS and Piezoresistive Sensors to 0.02%
  • Digital Interfaces: USB, RS-232
  • Comprehensive I/O Functions
  • Additional High-Bandwidth Analog Control
  • Input / Sensor Input
  • Comprehensive Software Package
Back to Top E-709 Technote




E-753 Sophisticated 1-Channel Digital Piezo Controller & Driver
Product Image - E-753
  • Highest Performance, Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Task Triggering
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors
Piezo Controller / Driver Datasheet




E-761 3-Channel Digital Piezo Nanopositioning Controller & Driver in PCI-Board Format
Product Image - E-761 PCI Bus
  • For Closed-Loop Piezoelectric Nanopositioning Systems with Capacitive Sensors
  • High-Speed PCI Interface
  • Additional High-Bandwidth Analog Interface
  • 32-Bit Digital Filters
  • 24-Bit DAC Resolution
  • 2 Linearization Systems
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • ID-Chip Support for Automatic Calibration
  • Integrated Linear Amplifiers
  • Extensive Software Package
Piezo Controller / Driver Datasheet




E-710 Multi-Channel Digital Piezo Controller & Driver with Dynamic Linearization
Product Image - Multi-Channel Digital Piezo Controllers with Dynamic Linearization
  • For Piezo Nanopositioners with Capacitive Feedback Sensors
  • 3-, 4- & 6-Channel Versions
  • 32-Bit Digital Filters
  • Hardware and Firmware Linearization
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity
  • ID Chip Support for Automatic Calibration
  • Optional High-Speed Parallel I/O or DSP Interface
  • Optional Analog Input
  • Integrated Linear Amplifiers
  • GCS (General Command Set) Compatible
Piezo Controller / Driver Datasheet




E-712 Modular Digital Piezo Controller System, up to 6 Axes
Product Image - Modular Digital Piezo Controller System, up to 6 Axes
  • Digital Controller of the Newest Generation: 600 MHz Processor; up to 50 kHz Sensor Update Rate;
  • Highly Stable 20-bit D/A Converters
  • Real-Time Operating System for Excellent Trajectory Control
  • Modular Design for Greatest Flexibility in Meeting Custom Requirements
  • Auto-Calibrating from Stage ID-Chip for Interchangeability of Controller and Mechanics w/o Recalibration
  • Flexible Interfacing: USB, RS-232 & Ethernet
  • Optional High-Bandwidth Analog Inputs and Outputs
Piezo Controller / Driver Datasheet




E-612 High-Speed NanoAutomation® Piezo Controllers & Drivers
Product Image - High-Speed NanoAutomation Piezo Controllers
  • 10 microsecond Parallel Command Port
  • OEM Modules and Bench-Top Versions
  • Controls Low-Voltage Piezo NanoPositioners with Capacitive Sensors
  • Opto-Isolation for EMI Immunity
  • Integrated PZT Power Amplifier
Piezo Controller / Driver Datasheet




3-Channel Nanocube Controllers & Drivers


E-664 NanoCube® Piezo Controller & Driver
Product Image - NanoCube Piezo Controller
  • 3 x 14 W Peak Power
  • Position Servo-Control
  • For P-611 NanoCube® NanoPositioning Systems
Back to Top Piezo Controller / Driver Datasheet




High-Power Piezo Drivers, High Voltage Amplifiers


E-481 High-Power High-Voltage Piezo Driver / Controller with Energy Recovery
Product Image - High-Power HVPZT Piezo Amplifier / Controller with Energy Recovery
  • High-Voltage Amplifier with 2000 W Peak Power
  • Energy Recovery
  • Output Voltage 0 to ±1000 V and bipolar
  • Optional Position Servo-Controller Module
  • Optional Computer Interface and Display Module
  • Differential Output
Download Technote, "High Power Piezo Drivers / 24/7 High Performance Piezo Operation"

Advances in Piezo Actuators for High Frequency, High Duty Cycle Industrial Applications
Piezo Controller / Driver Datasheet




E-471 High-Power, Modular HVPZT (1000 V) Piezo Drivers / Controllers
Product Image - High-Power, Modular HVPZT Piezo Drivers / Controllers
  • Integrated Linear High-Voltage Amplifier w/ 550 W Peak Power
  • Output Voltage -3 to -1100 V & Bipolar
  • 1- and 2-Channel Versions
  • Optional Position Servo-Control Modules
  • Optional USB, RS-232 & IEEE 488 Interface Module & Display
Piezo Controller / Driver Datasheet

Methods to Improve Piezo Dynamics, Accuracy and Linearity: Preshaping / DDL / APC




Controllers for Bender Piezo Actuators


E-651 Piezo Controller & Driver for Closed-Loop Low-Voltage Piezo (60 V) Multilayer Bender Actuators
Product Image - Piezo Controller for Closed-Loop Low-Voltage Piezo Multilayer Bender Actuators
  • Controller for Closed-Loop Multilayer Bimorph Actuators
  • 1- and 2-Channel Versions
  • Integrated Linear Amplifiers
  • Bench-Top & OEM-Board Versions
Back to Top Piezo Controller / Driver Datasheet




E-650 Piezo Drivers for Low-Voltage Piezo (60 V) Multilayer Bender Actuators
Product Image - Piezo Drivers for Low-Voltage Piezo Multilayer Bender Actuators
  • Specifically Designed to Drive Multilayer Bimorph Actuators
  • Bench-Top and OEM Versions
  • Integrated Linear Amplifier w/ up to 18 W Peak Power
  • LCD Voltage Display
  • Output Voltage ±30 V or 0 to 60 V and Separate Fixed Voltage
Piezo Controller / Driver Datasheet




OEM Controller Modules


E-413 Compact Piezo Amplifier for DuraAct™ Patch Transducers and PICA™ Shear Piezo Actuators
Product Image - Low-Voltage Piezo Piezo Driver & Position Servo-Controller Modules, OEM Version
  • Peak Power to 50 W
  • OEM Module / Bench-Top for PICA™ Shear Actuators
  • OEM Module for DuraAct™ Piezoelectric Patch Transducers
Piezo Controller / Driver Datasheet




E-610 LVPZT (100 V) Piezo Linear Amplifier & Position Servo-Controller Modules, OEM Version
Product Image - Low-Voltage Piezo Piezo Driver & Position Servo-Controller Modules, OEM Version
  • Open-Loop and Closed-Loop Versions
  • For Capacitive, Strain Gauge and LVDT Sensors
  • Integrated Linear Amplifier w/ 14 W Peak Power
  • Runs on Single Stabilized Voltage (12 to 30 VDC
Piezo Controller / Driver Datasheet




E-621 LVPZT (100 V) Piezo Amplifier & Servo-Controller Module with
   High-Speed USB Interface
Product Image - Low-Voltage Piezo Piezo Driver & Servo-Controller Module with High-Speed USB Interface
  • Integrated 24-Bit USB Interface
  • Network Capability with up to 12 Channels
  • Up to 12 W Peak Power
  • Position Control with Strain Gauge or Capacitive Sensor
  • Notch Filter for Higher Bandwidth
  • Additional Analog Interface
  • Table for User-Defined Curves
Back to Top Piezo Controller / Driver Datasheet




E-831 OEM Piezo Driver and Power Supply Modules
Product Image - OEM Piezo Driver and Power Supply Modules
  • Cost Effective Piezo Driver
  • Small Size
  • Low Noise, High Stability
  • Easy-to-Use
  • Full Overcurrent, Short-Circuit and Temperature Protection
  • Power-up/down Without Voltage Spikes
Piezo Controller / Driver Datasheet




E-462 HVPZT (1000 V) Piezo Drivers
Product Image - HVPZT Piezo Drivers
  • Single Channel Piezo Driver
  • 12 V Battery or P/S Operation
  • Output Voltage Range +10 to +1000 V
Piezo Controller / Driver Datasheet




E-660 LVPZT (100 V) Piezo Drivers
Product Image - Low-Voltage Piezo Piezo Drivers
  • Single-Channel Piezo Driver
  • 12 V Battery or P/S Operation
  • Output Voltage Range 5 to 100 V
Back to Top Piezo Controller / Driver Datasheet




Modular Controllers


E-500 Modular Piezo Driver / Controller for Low-Voltage (100 V) and High-Voltage (1000 V) & Systems
Product Image - Modular Piezo Control Systems (HVPZT & Low-Voltage Piezo)
  • For High- and Low-Voltage Piezo Systems
  • 19- and 9.5-Inch Chassis
  • Choice of Linear Amplifier Modules
  • Optional Position Servo-Control Modules
  • Optional Display and RS-232 & IEEE 488 Interface Module
Piezo Controller / Driver Datasheet




E-536 PicoCube® Piezo Controller
PicoCube® Piezo Controller
  • Extremely Low Noise: Resolution to 25 Picometers
  • For P-363 PicoCube® Systems
  • Peak Power 3 x 100 W
  • Ultra-Low Noise
  • Output Voltage ±250 V
Piezo Controller / Driver Datasheet




E-509 Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems
Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems
  • Position Servo-Control for Piezo-Driven Nanopositioning Systems
  • Improves Linearity
  • Eliminates Drift & Hysteresis
  • For Capacitive Sensors, Strain Gauge Sensors & LVDT Sensors
  • Increases Piezo Stiffness
  • Notch Filter for Improved Dynamics
Piezo Controller / Driver Datasheet




E-508 High-Voltage Piezo Driver (1000 V) Module
Product Image - HVPZT Piezo Driver Module
  • Integrated Linear Amplifier, up to 400 W Peak Power
  • Output Voltage Range +3 to +1100 V & Bipolar
  • ±250 V for Shear Actuators
Back to Top Piezo Controller / Driver Datasheet




E-518 Digital Piezo Controller Operation Module
Computer Interface and Display Module for Modular Piezo Controllers
  • Macro Command Language / Stand-Alone Functionality
  • Low-Noise 24-bit D/A Converter
  • Sample Rate 25 kHz
  • TCP/IP, USB, IEEE 488 and RS-232 Interfaces
  • 6-Digit Display for Voltage and Position
  • 1- & 3-Channel Versions
  • Wave Generator with Programmable Trigger-I/O
  • Module for E-500 Piezo Controller Rack
Piezo Controller / Driver Datasheet




E-503 LVPZT (100 V) Piezo Driver Module, 3 Channels
LVPZT Piezo Driver Module, 3 Channels
  • Integrated Linear Amplifiers, 3 x 14 W Peak Power
  • Output Voltage Range -20 to +120 V
  • E-503.00S with 2 amplifier channels and one fixed voltage of +100 V
Back to Top Piezo Controller / Driver Datasheet




E-515 Display Modules for Modular Piezo Controllers
Display Modules for Modular Piezo Controllers
  • 3 1/2-digit LED Display
  • For Voltage & Displacement Data
  • 1- & 3-Channel Versions
Piezo Controller / Driver Datasheet




Single Channel Piezo Drivers / Controllers / Cards


E-621 LVPZT (100 V) Piezo Amplifier & Servo-Controller Module, High-Speed USB Interface
Product Image - LVPZT Piezo Driver & Servo-Controller Module with High-Speed USB Interface
  • Integrated 24-Bit High-Speed USB Interface
  • Integrated Linear Amplifier, 14 W Peak Power
  • Network Capability with up to 12 Channels
  • For Capacitive, LVDT and Strain Gauge Position Sensors
  • GCS (General Command Set) Compatible
Piezo Controller / Driver Datasheet




E-610 LVPZT (100 V) Piezo Driver & Position Servo-Controller Modules, OEM Version
Product Image - LVPZT Piezo Driver & Position Servo-Controller Modules, OEM Version
  • Open-Loop and Closed-Loop Versions
  • For Capacitive, Strain Gauge and LVDT Sensors
  • Integrated Linear Amplifier, 14 W Peak Power
  • Runs on Single Stabilized Voltage (12 to 30 VDC)
Back to Top Piezo Controller / Driver Datasheet




E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface
Product Image - LVPZT Piezo Driver / Servo-Controller with Fast RS-232 Interface
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 12 Channels
  • Integrated Linear Piezo Driver with 36 W Peak Power
  • SGS, LVDT and Capacitive Sensor Servo-Control
  • Table for User-Defined Curves
  • GCS (General Command Set) Compatible
  • UL and CSA certified
Piezo Controller / Driver Datasheet




E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface
Product Image - Compact LVPZT Piezo Amplifier & Servo-Controller with High-Speed RS-232 Interface Interface
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Integrated Linear Piezo Driver, 14 W Peak Power
  • Network Capability with up to 4 Channels
  • For Capacitive, LVDT and Strain Gauge Position Sensors
  • Wave Table for User-Defined Curves
  • GCS (General Command Set) Compatible
Back to Top Piezo Controller / Driver Datasheet




E-753 High-Speed Digital Piezo NanoAutomation® Controller
Product Image - High-Speed Digital Piezo NanoAutomation Controller
  • Next Generation Digital Controller Provides Higher Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Automatic Calibration Data Coaching from Stage ID-Chip
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Triggering Tasks
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors
Piezo Controller / Driver Datasheet




E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Controller/Driver
Product Image - High-Speed Digital Piezo NanoAutomation Controller
  • For NEXACT® Drives and Positioning Systems
  • Complete System with Controller, Integrated Power Amplifiers and Software
  • Open-Loop Operation, or Closed-Loop with Linear Encoder
  • High Performance at Low Cost
  • Daisy-Chain Networking for Multi-Axis Operation
  • Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
  • I/O for Automation, Joystick for Manual Operation
  • Parameter Changes On-the-Fly
Piezo Controller / Driver Datasheet




E-862 Low-Cost NEXACT® Drive Electronics
Product Image - High-Speed Digital Piezo NanoAutomation Controller
  • For NEXACT® PiezoWalk® Drives & Stages
  • Combined Step Generator and Power Amplifier
  • Cost-Effective Design
  • Interface for Automation, Joystick for Manual Operation
Piezo Controller / Driver Datasheet




C-867 Controller for PILine® Piezo Linear Drives
  • Optimized for PILine® Ultrasonic Piezo Linear Motors
  • High-Bandwidth Encoder Inputs Allow High Speed and Resolution
  • PID Servo-Control with Dynamic Parameter Switching
  • Integrated Piezo Motor Power Driver
  • USB, RS-232 and Analog Interfaces (e.g. for Joystick)
  • 4 + 4 Programmable TTL-I/Os for Flexible Automation
  • Data Recorder
  • Daisy-Chain Networking for up to 16 Axes
  • Powerful Macro Programming Language, e.g. for Stand-Alone Operation
  • Extensive Software Support, LabVIEW, DLL ...
Piezo Controller / Driver Datasheet




Open-Loop Piezo Drivers


E-663 LVPZT Low Voltage (100 V) Piezo Driver, 3 Channels
Product Image - LVPZT Piezo Amplifier, 3 Channels
  • 3 Independent Channels
  • Integrated Linear Amplifiers, 3 x 14 W Peak Power
  • 3 LED Voltage Displays
  • Output Voltage Range - 20 to 120 V
Piezo Controller / Driver Datasheet




E-464 High-Voltage Piezo Driver (1000 V), 3 Channels
Product Image - HVPZT Piezo Amplifier, 3 Channels
  • 3 Independent Channels
  • Integrated Linear Amplifiers, 3 x 25 W Peak Power
  • 3 LED Voltage Displays
  • Output Voltage Range 0 to + 1000 V
Back to Top Piezo Controller / Driver Datasheet




Controller for Fast Steering Mirrors


E-616 Controller for Multi-Axis Piezo Tip/Tilt Mirrors and Platforms
Product Image - E-616 Controller for Multi-Axis Piezo Tip/Tilt Mirrors and Platforms
  • Three Integrated Amplifiers Provide up to 10 W Peak Power
  • Closed-Loop and Open-Loop Versions
  • Internal Coordinate Transformation Simplifies Control of Parallel Kinematics Designs (Tripod & Differential Drive)
  • Compact and Cost-Effective Design for OEMs or Bench-Top
Piezo Controller / Driver Datasheet








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    Piezo Controllers    DuraAct™ Patch Transducers
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