Piezo: Piezo Motor Mechanics, Ultrasonic Motors, Piezo Systems, PiezoWalk Motor, Piezo Stepping Motor, Stick Slip Motor

Piezo Mechanisms: Piezo Motors / Piezo Motor Linear Stages / Non-Magnetic Actuators


High Resolution & High Force		Ultrasonic High Speed Motors		High-Speed Ultrasonic Translation Stages		XY Piezo Motor Linear Slide		Controllers for Piezo Motors

Piezo Motors are based on the Piezoelectric Effect compared to Traditional Electrodynamic Motors which are based on Magnetism. However, not all piezo motors are created equal.

Ultrasonic motors (resonant motors) (PILine) are optimized for high speed and and PI piezo stepping motors (PiezoWalk) are optimized for high force and resolution. Both types are basically non-magnetic and vacuum compatible and can be designed to provide very long travel, much more than classical piezo stack actuators. In addition piezo motors are auto-locking, when at rest.

All types of PI piezo motors can be sterilized (baked at high temperatures) and do not require lubricants, a perfect match for many applications from medical engineering to semiconductor test & metrology.

More Information & Catalog Downloads...

Download the PI Piezo Motor PDF Brochures

Precision Linear Actuator Catalog

Miniature Linear Stages Catalog

PILine^® Ultrasonic Resonant Piezo Motor / Actuators
PILine® Ultrasonic Resonant Piezo Motor Technology
		Patented, Low-Profile, Fast High Dynamic Range from µm/sec to 500 mm/sec, Acceleration to 10g Precise: Min. Incremental Motion to 0.01 microns Self Locking, Push-/Pull Forces to 10 N No Electro-Magnetic Fields, not Influenced by Electro-Magnetic Fields


Back to Top More information

Ultrasonic Motors (Resonant Motors), Linear Translation Stages
PILine® Miniature ULtrasonic Motor Linear Slide, XY Stage Combinations
		Closed-loop: Smallest Ultrasonic Linear Stage with Linear Encoder Acceleration to 5g, Very Fast Resolution to 0.1 Micron Direct-Metrology Linear Encoder Self-Locking at Rest for High Stability XY Stage Combinations Vacuum Versions Available 19 mm Travel


Back to Top Piezo Motor Datasheet

Miniature Motorized Linear Slide, with Linear Encoder & Inertia PiezoMotor
		Closed Loop: Direct Metrology Linear Encoder with Nanometer Resolution 15mm ultra-Low Profile, 25mm Travel High Guiding Accuracy with Crossed Roller Bearings Compact XY Combinations Piezo Linear Motor with 8N Drive Force Self-Locking at Rest for High Stability


Back to Top Piezo Motor Datasheet

Low-Profile XY Microscope Stage, with Ultrasonic Piezo Motor & Linear Encoder
		Smaller than Classical XY Motor Stages 25x25 mm Travel Fast Ultrasonic Piezomotors for Speed to 100mm/sec 0.1 microns Resolution with Linear Encoders Large Clear Aperture Self-Locking at Rest for High Stability Compatible with PI Piezo Flexure Stages


Piezo Motor Datasheet

NEXLINE® / NEXACT® Piezo Stepping Linear Motors, High Resolution
N-310 NEXACT^® Compact Pusher Actuator with Piezo Stepping Linear Motor
		Compact, yet high Push/Pull Force to 10N 20 mm Standard Travel Range Two Operating Modes: Continuous Stepping Mode & Continuously Variable, Highly Dynamic Analog Mode for 30 pm Resolution Low Operating Voltage (40V) Self Locking, no Heat Dissipation, Nanometer Stability Non-Magnetic and Vacuum-Compatible Working Principle


Piezo Motor Datasheet

N-381 NEXLINE® Linear Manipulator, Actuator, Piezo Stepper
		Two Operating Modes: Continuous Stepping Mode & Continuously Variable, Highly Dynamic Analog Mode for 30 pm Resolution 30 mm Travel Range Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated 20 Nanometer Linear Encoder Option Very High Acceleration, e.g. for Cell Penetration Force Generation Up to 10 N Ultra High Stability, Self Locking at Rest, no Heat Generation Smooth Motion, no Closed-Loop Jitter Vacuum-Compatible and Non-Magnetic Versions


Back to Top Piezo Motor Datasheet

N-111 NEXLINE® OEM Piezo Linear Motor Actuator, High Resolution, Long Travel, PiezoWalk® Principle
		Compact, Yet High Force to 50N, (70N Holding Force) 10 mm Travel Range Resolution to 0.025 Nanometers Auto-Locking at Rest, Ultra High Stability, No Heat Generation Non-Magnetic and Vacuum-Compatible Working Principle Cleanroom Compatible


Back to Top Piezo Motor Datasheet

N-216 NEXLINE® High-Force PiezoWalk® Linear Actuator: Long-Travel Nanopositioner
	To 30 Picometers Resolution Travel Range 20 mm High Force: Up to 800 N Holding Force Ultra High Stability: Auto-Locking at Rest, No Heat Generation Cleanroom Compatible, Non-Magnetic & Vacuum-Compatible Principle


Piezo Motor Datasheet

Piezo Motor Controllers
C-867 Ultrasonic Motor Controller & Driver Closed-Loop
		For PILine® Ultrasonic Linear Piezo Motors, One and Two Axis Integrated Power Drivers for Ultrasonic Motors Sophisticated Servo-Controller with Dynamic Parameter Switching High-Bandwidth Encoder Input for High Speed and Resolution USB, RS-232 and Analog Interfaces (Joystick, etc) 4 + 4 Programmable TTL-I/Os for Flexible Automation Data Recorder Daisy-Chain Networking for up to 16 Axes Powerful Macro Programming Language, e.g. for Stand-Alone Operation Extensive Software Support, LabVIEW, DLL ...


Piezo Motor Controller Datasheet

PiezoWalk® Controller for NEXLINE® Motors
E-755 Digital Piezo Motor Controller for NEXLINE®
		Sophisticated Control Algorithms for NEXLINE® Nanopositioning Piezo Linear Motors 24 Bit D/A Resolution, 32 Bit Digital Filters Fully Programmable Low-Pass and Notch Filters Non-Volatile User Settings and Last-Position Data PI GCS General Command Set Compatible


Back to Top Piezo Motor Controller Datasheet

E-861 Controller/Driver, for NEXACT® PiezoWalk® Linear Motors / Actuators
		Closed-Loop Operatin with Linear Encoder and Open-Loop Operation I/O for Automation, Joystick for Manual Operation Stand-Alone Functionality with Autostart Macro Non-Volatile Macro Storage Complete System with Controller, Integrated Power Amplifiers and Software Networking for Multi-Axis Operation Parameter Changes On-the-Fly