Piezo: Piezo Mechanism Piezo Mechanics, Piezo System, Piezo Motor, Ceramic Linear Motors Ultrasonic Linear Motor, Piezo-Walk Motor, Piezo Stepping Motor Stick Slip Motor.

Piezo Mechanisms: Piezo Motors / Piezo Motor Linear Stages / Non-Magnetic Actuators


High Resolution & High Force		Ultrasonic High Speed Motors		High-Speed Ultrasonic Translation Stages		XY Piezo Motor Linear Slide		Controllers for Piezo Motors

Not all piezo motors are created equal.

Ultrasonic motors (resonant motors) (PILine) are optimized for high speed and and PI piezo stepping motors (PiezoWalk) are optimized for high force and resolution. Both types are basically non-magnetic and vacuum compatible and can be designed to provide very long travel, much more than classical piezo stack actuators. In addition piezo motors are auto-locking, when at rest.

All types of PI piezo motors can be sterilized (baked at high temperatures) and do not require lubricants, a perfect match for many applications from medical engineering to semiconductor test & metrology.

More Information & Catalog Downloads...

Selection Guides

Download the PI Piezo Motor PDF Brochures

Piezo Linear Motor Introduction

PILine^® Ultrasonic Piezomotor Working Principle

Precision Linear Actuator Catalog

Miniature Linear Stages Catalog

NEXLINE^® Piezo-Walk® Working Principle

Test and Quality Control

PILine^® Ultrasonic Resonant Piezo Motor / Actuators
PILine® Ultrasonic Linear Piezo-Motor High Speed, Compact for OEMs
		Patented, Compact, Fast Compact & Easy Mounting Fast: Velocity up to 500 mm/sec, Acceleration to 5 g Precise: Min. Incremental Motion to 0.05 microns Self Locking, Push-/Pull Forces to 4 N No Electro-Magnetic Fields, not Influenced by Electro-Magnetic Fields


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RodDrive Ultrasonic Piezo Motor Pusher Actuator
		Drive-Component for Easy Integration into Motion Systems Long Travel Ranges 50 Nanometers Resolution Fast: Velocity to 400 mm/sec Self-Locking at Rest for High Stability


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M-272 Fast Ultrasonic Linear Shaft Motor for OEM Automation
		Stable: Self Locking at Rest, No Heat Generation Integrated Linear Guides Fast: 200 mm/sec Integrated Linear Encoder To 8N Force


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Ultrasonic Motor-Driven Linear Slides / Translation Stages
PILine® Miniature Linear Slide, Resonant Piezo Motor, XY Stage Combinations
		Closed-loop: Smallest Ultrasonic Linear Stage with Linear Encoder Acceleration to 10 g, Very Fast Resolution to 0.1 Micron Direct-Metrology Linear Encoder Self-Locking at Rest for High Stability XY Stage Combinations Vacuum Versions Available 19 mm Travel


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PILine® Miniature Linear Slide with High-Speed Ultrasonic Linear PiezoMotor
		Open Loop Extremely Compact Linear-Motor Driven Stage 20 mm Travel Fast: Velocity to 500 mm/sec, Acceleration to 20 g Resolution to 50 Nanometers Self-Locking at Rest for High Stability XY-Combinations Feasible 20000 h MTBF Vacuum Version to 10^-7 hPa


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Miniature Motorized Linear Slide, with Linear Encoder & High-Speed Ultrasonic Linear PiezoMotor
		Closed Loop: Direct Metrology Linear Encoder with 0.1 microns Resolution 15 mm ultra-Low Profile, 25 mm Travel Fast: to 400 mm/sec High Guiding Accuracy with Crossed Roller Bearings Compact XY Combinations Piezo Linear Motor with 6 N Drive Force Self-Locking at Rest for High Stability


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Precision Low-Profile Linear Slide / Translation Stage with & High-Speed Ultrasonic Piezomotor & Linear Encoder
		Closed-Loop: Linear Encoder, 0.1 microns Resolution (Direct Metrology) 50 mm Travel Range Fast: Velocity up to 350 mm/sec Only 21 mm Profile Height XY Combination Feasible Excellent Guiding Accuracy Through Crossed Roller Bearings PILine®: Non-Magnetic and Vacuum-Compatible Working Principle Self-Locking at Rest for High Stability


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Low-Profile XY Microscope Stage, with Piezo Linear Motor & Linear Encoder
		Significantly more compact than Classical XY Motor Stages 25x25 mm Travel High Speed Piezomotor Drives for Speed to 100 mm/sec 0.1 microns Resolution with Linear Encoders Large Clear Aperture Self-Locking at Rest for High Stability Compatible with PI Piezo Flexure Stages


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NEXLINE® / NEXACT® Piezo Stepping Linear Motors, High Resolution
N-310 NEXACT^® Compact Pusher Actuator wiht Piezo Stepping Linear Motor
		Compact, yet high Push/Pull Force to 10N 20 mm Standard Travel Range Two Operating Modes: Continuous Stepping Mode & Continuously Variable, Highly Dynamic Analog Mode for 30 pm Resolution Low Operating Voltage (40V) Self Locking, no Heat Dissipation, Nanometer Stability Non-Magnetic and Vacuum-Compatible Working Principle


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N-381 NEXLINE® Linear Manipulator, Actuator, Piezo Stepper
		Two Operating Modes: Continuous Stepping Mode & Continuously Variable, Highly Dynamic Analog Mode for 30 pm Resolution 30 mm Travel Range Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated 20 Nanometer Linear Encoder Option Very High Acceleration, e.g. for Cell Penetration Force Generation Up to 10 N Ultra High Stability, Self Locking at Rest, no Heat Generation Smooth Motion, no Closed-Loop Jitter Vacuum-Compatible and Non-Magnetic Versions


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N-111 NEXLINE® OEM Piezo Linear Motor Actuator, High Resolution, Long Travel, PiezoWalk® Principle
		Compact, Yet High Force to 50N, (70N Holding Force) 10 mm Travel Range Resolution to 0.025 Nanometers Auto-Locking at Rest, Ultra High Stability, No Heat Generation Non-Magnetic and Vacuum-Compatible Working Principle Cleanroom Compatible


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N-216 NEXLINE® High-Force PiezoWalk® Linear Actuator: Long-Travel Nanopositioner
	To 30 Picometers Resolution Travel Range 20 mm High Force: Up to 800 N Holding Force Ultra High Stability: Auto-Locking at Rest, No Heat Generation Cleanroom Compatible, Non-Magnetic & Vacuum-Compatible Principle


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Piezo Motor Controllers
C-867 Ultrasonic Motor Controller & Driver Closed-Loop
		For PILine® Ultrasonic Linear Piezo Motors, One and Two Axis Integrated Power Drivers for Ultrasonic Motors Sophisticated Servo-Controller with Dynamic Parameter Switching High-Bandwidth Encoder Input for High Speed and Resolution USB, RS-232 and Analog Interfaces (Joystick, etc) 4 + 4 Programmable TTL-I/Os for Flexible Automation Data Recorder Daisy-Chain Networking for up to 16 Axes Powerful Macro Programming Language, e.g. for Stand-Alone Operation Extensive Software Support, LabVIEW, DLL ...


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C-170 RedStone Controller for Open-Loop PILine^® Ultrasonic Motors
		Drives 2 Open-Loop PILine^® Piezo Motors or Stages Programmable Motion Sequencer Integrated Piezo Drivers Stand-Alone Functionality Optional Joystick 8 Programmable TTL Input/Output Lines 4 Analog Inputs Single 12 VDC Operation


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PiezoWalk® Controller for NEXLINE® Motors
E-755 Digital Piezo Motor Controller for NEXLINE®
		Sophisticated Control Algorithms for NEXLINE® Nanopositioning Piezo Linear Motors 24 Bit D/A Resolution, 32 Bit Digital Filters Fully Programmable Low-Pass and Notch Filters Non-Volatile User Settings and Last-Position Data PI GCS General Command Set Compatible


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E-861 Controller/Driver, for NEXACT® PiezoWalk® Linear Motors / Actuators
		Closed-Loop Operatin with Linear Encoder and Open-Loop Operation I/O for Automation, Joystick for Manual Operation Stand-Alone Functionality with Autostart Macro Non-Volatile Macro Storage Complete System with Controller, Integrated Power Amplifiers and Software Networking for Multi-Axis Operation Parameter Changes On-the-Fly