Piezo Mechanisms: Piezo Motors / Piezo Motor Linear Stages / Non-Magnetic Actuators






High Resolution
& High Force
Ultrasonic High Speed Motors High-Speed Ultrasonic Translation Stages XY Piezo Motor Linear Slide Controllers for Piezo Motors
 
Not all piezo motors are created equal.

Ultrasonic motors (resonant motors) (PILine) are optimized for high speed and and PI piezo stepping motors (PiezoWalk) are optimized for high force and resolution. Both types are basically non-magnetic and vacuum compatible and can be designed to provide very long travel, much more than classical piezo stack actuators. In addition piezo motors are auto-locking, when at rest.

All types of PI piezo motors can be sterilized (baked at high temperatures) and do not require lubricants, a perfect match for many applications from medical engineering to semiconductor test & metrology.

More Information & Catalog Downloads...

Download the PI Piezo Motor PDF Brochures
Precision Linear Actuator Catalog
Miniature Linear Stages Catalog




PILine® Ultrasonic Resonant Piezo Motor / Actuators


PILine® Ultrasonic Resonant Piezo Motor Technology
PILine High-Speed, Ultrasonic Linear PiezoMotor for OEMs
  • Patented, Low-Profile, Fast
  • High Dynamic Range from µm/sec to 500 mm/sec, Acceleration to 10g
  • Precise: Min. Incremental Motion to 0.01 microns
  • Self Locking, Push-/Pull Forces to 10 N
  • No Electro-Magnetic Fields, not Influenced by Electro-Magnetic Fields
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Ultrasonic Motor-Driven Linear Slides / Translation Stages


PILine® Miniature Linear Slide, Resonant Piezo Motor, XY Stage Combinations
 PILine Miniature Translation Stages with Closed-Loop Ultrasonic Linear PiezoMotors
  • Closed-loop: Smallest Ultrasonic Linear Stage with Linear Encoder
  • Acceleration to 10 g, Very Fast
  • Resolution to 0.1 Micron
  • Direct-Metrology Linear Encoder
  • Self-Locking at Rest for High Stability
  • XY Stage Combinations
  • Vacuum Versions Available
  • 19 mm Travel
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Miniature Motorized Linear Slide, with Linear Encoder & High-Speed Ultrasonic Linear PiezoMotor
 PILine Miniature Translation Stages with Closed-Loop Ultrasonic Linear PiezoMotors
  • Closed Loop: Direct Metrology Linear Encoder with 0.1 microns Resolution
  • 15 mm ultra-Low Profile,
  • 25 mm Travel
  • Fast: to 400 mm/sec
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self-Locking at Rest for High Stability
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Low-Profile XY Microscope Stage, with Piezo Linear Motor & Linear Encoder
Low-Profile XY Microscope Stage
  • Significantly more compact than Classical XY Motor Stages
  • 25x25 mm Travel
  • High Speed Piezomotor Drives for Speed to 100 mm/sec
  • 0.1 microns Resolution with Linear Encoders
  • Large Clear Aperture
  • Self-Locking at Rest for High Stability
  • Compatible with PI Piezo Flexure Stages
Online Datasheet




NEXLINE® / NEXACT® Piezo Stepping Linear Motors, High Resolution


N-310 NEXACT® Compact Pusher Actuator with Piezo Stepping Linear Motor
NEXLINE Piezo Linear Actuator
  • Compact, yet high Push/Pull Force to 10N
  • 20 mm Standard Travel Range
  • Two Operating Modes: Continuous Stepping Mode & Continuously Variable, Highly Dynamic Analog Mode for 30 pm Resolution
  • Low Operating Voltage (40V)
  • Self Locking, no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle
Online Datasheet




N-381 NEXLINE® Linear Manipulator, Actuator, Piezo Stepper
NEXLINE Linear Actuator, Manipulator, Piezo Stepper
  • Two Operating Modes: Continuous Stepping Mode & Continuously Variable, Highly Dynamic Analog Mode for 30 pm Resolution
  • 30 mm Travel Range
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated 20 Nanometer Linear Encoder Option
  • Very High Acceleration, e.g. for Cell Penetration
  • Force Generation Up to 10 N
  • Ultra High Stability, Self Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions
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N-111 NEXLINE® OEM Piezo Linear Motor Actuator, High Resolution, Long Travel, PiezoWalk® Principle
NEXLINE Miniature Piezo Linear Motor Drive
  • Compact, Yet High Force to 50N, (70N Holding Force)
  • 10 mm Travel Range
  • Resolution to 0.025 Nanometers
  • Auto-Locking at Rest, Ultra High Stability, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
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N-216 NEXLINE® High-Force PiezoWalk® Linear Actuator: Long-Travel Nanopositioner
NEXLINE High-Load Piezo Nanopositioning Drive
  • To 30 Picometers Resolution
  • Travel Range 20 mm
  • High Force: Up to 800 N Holding Force
  • Ultra High Stability: Auto-Locking at Rest, No Heat Generation
  • Cleanroom Compatible, Non-Magnetic & Vacuum-Compatible Principle
Online Datasheet




Piezo Motor Controllers


C-867 Ultrasonic Motor Controller & Driver Closed-Loop
  • For PILine® Ultrasonic Linear Piezo Motors, One and Two Axis
  • Integrated Power Drivers for Ultrasonic Motors
  • Sophisticated Servo-Controller with Dynamic Parameter Switching
  • High-Bandwidth Encoder Input for High Speed and Resolution
  • USB, RS-232 and Analog Interfaces (Joystick, etc)
  • 4 + 4 Programmable TTL-I/Os for Flexible Automation
  • Data Recorder
  • Daisy-Chain Networking for up to 16 Axes
  • Powerful Macro Programming Language, e.g. for Stand-Alone Operation
  • Extensive Software Support, LabVIEW, DLL ...
Online Datasheet




PiezoWalk® Controller for NEXLINE® Motors


E-755 Digital Piezo Motor Controller for NEXLINE®
Digital Controller for NEXLINE Nanopositioning Linear Drives
  • Sophisticated Control Algorithms for NEXLINE® Nanopositioning Piezo Linear Motors
  • 24 Bit D/A Resolution, 32 Bit Digital Filters
  • Fully Programmable Low-Pass and Notch Filters
  • Non-Volatile User Settings and Last-Position Data
  • PI GCS General Command Set Compatible
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E-861 Controller/Driver, for NEXACT® PiezoWalk® Linear Motors / Actuators
Digital Controller for NEXLINE Nanopositioning Linear Drives
  • Closed-Loop Operatin with Linear Encoder and Open-Loop Operation
  • I/O for Automation, Joystick for Manual Operation
  • Stand-Alone Functionality with Autostart Macro
  • Non-Volatile Macro Storage
  • Complete System with Controller,
    Integrated Power Amplifiers and Software
  • Networking for Multi-Axis Operation
  • Parameter Changes On-the-Fly
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Linear Piezo Motors    Piezo Actuators    Steering Mirrors    Multi-Axis Scanning Stages/Flexure Stages
    Piezo Controllers    DuraAct™ Patch Transducers