Piezo Mechanics: Piezo Flexure Stage, Piezo Stage, XY Piezo Stage Piezoelectric Nanopositioner: Nanopositioning Stage, Low Bow Stage

Piezo Flexure Nanopositioning & Scanning Stages (Piezostages)

Single Axis Systems	Z-Stages & Actuators	Microscope Stages	Objective Scanners	Multi-Axis no Aperture


Multi-Axis, Aperture	Motor Drives	Tip/Tilt Mirrors	Motor Stages/Actuators	Piezo Controllers

Piezo-Motor-Driven Stages (Long Travel)

PI is the global leader in design and manufacture of piezoelectric nanopositioning and scanning stages.

Advantages of PI Piezo Stage systems are: frictionless flexure designs, parallel kinematics (better multiaxis trajectory control), parallel metrology (keeps motion of all controlled axes inside the servo loop), capacitive feedback (direct measuring, non contact), digital control (wider dynamic range, better linearity, autocalibration…).

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Catalog: Planar Piezo Stage for AFM

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Experience / Custom Systems

Reasons for Choosing PI

Test and Calibration

Single Axis Piezo Stage Nanopositioning Systems
P-780 Miniature Piezo Stage Nanopositioning/Scanning System with Direct Metrology
		Fast Response (1 kHz Resonant Frequency) Stainless Steel Construction Frictionless Precision Flexure Guiding System 80 Micron Travel Range Direct Metrology with LVDT Sensor Resolution <5 Nanometer PICMA^® High-Performance Multilayer Piezo Drives


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P-750 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
		10 kg Load Capacity 1 Nanometer Lateral Guiding Precision Resolution <1 Nanometer PICMA^® High-Performance Multilayer Piezo Actuators Fast Response 75 Micron Travel Range Direct Metrology with Capacitive Sensors for Highest Precision Frictionless Precision Flexure Guiding System


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PIHera^® Mini Piezo-Stage, Long Travel, Direct Metrology
		XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System Long-Life Multilayer Piezo Drives, Low Voltage Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions


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P-712 Low-Profile OEM Piezo Scanner
		High Dynamics, 5 millisec Settling Time 30 µm Travel Range Resolution to 0.2 nm Compact Design, Low Profile, 40 x 40 x 6 mm Clear Aperture, 25 x 15 mm PICMA® Long Life Piezo Drives


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P-772.OL Ultra-Compact Open-Loop PZT Nanopositioning PiezoStage
		Miniaturized Flexure-Guided Stage 50 Picometer Resolution 10 Micron Travel Ultra-Fast Response (1.7 kHz Resonant Frequency) Closed-Loop Version Available


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P-772 Ultra-Compact Piezo Stage NanoAutomation^® System with Direct Metrology
		Smallest Piezo Flexure-Guided Stage with Capacitive Direct Metrology Feedback Ideal for Head/Media Test & Fiber Optics Resolution <0.1 Nanometers Ultra-Fast Response (1.7 kHz Resonant Frequency) ID-Chip for Auto Calibrate Function Frictionless Precision Flexure Guiding System PICMA^® High-Performance Multilayer Piezo Drives


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P-752 Piezo NanoAutomation^® Stages with Direct Metrology
		Ultra-Fast Response Ultra-Precise Trajectory Control Digital Controllers with Fast FiberLink Interface Available ID-Chip for AutoCalibrate Function Direct-Metrology Capacitive Sensors for Highest Precision 0.1 Nanometers Resolution PICMA^® High-Performance Multilayer Piezo Drives


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P-753 LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology
		Unique Design: Both Piezo-Stage and Piezo Actuator Frictionless Precision Flexure Guiding System 0.05 Nanometers Resolution Direct Metrology with Capacitive Sensors for Highest Precision Ultra-Fast Response, Very Compact PICMA^® High-Performance Multilayer Piezo Drives ID-Chip for Auto Calibrate Function Vacuum Versions Available


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P-601 PiezoMove^® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
		Flexure Guidance for Frictionless, Ultra-Straight Motion Travel Ranges to 480 Micron Resolution to 0.2 Nanometer High Dynamics and Stiffness PICMA^® High-Performance Piezo Actuators Open and Closed-Loop Versions Ideal for OEM Applications


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P-602 PiezoMove^® Flexure Actuator with High Stiffness. Integrated Guiding System, High Force and Large Travel Ranges
		Frictionless Flexure Guiding System for Straight Motion Integrated Motion Amplifier for Travel Ranges to 1 mm High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction Outstanding Lifetime Due to PICMA® Piezo Actuators Available with Integrated Position Sensor Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible Ideal for OEM-Applications in Adaptronics, Biotechnology or Microfluidics


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P-603 PiezoMove^® Linear Actuator: Low-cost and with Large Travel Ranges
		Frictionless, High-Precision Flexure Guiding System Travel Ranges to 500 µm Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators Available with Integrated Position Sensor Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible


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P-620.Z · P-621.Z · P-622.Z PIHera^® Piezo-Z Nanopositioning Stages with Direct Metrology
		Z-Axis Travel to 400 Micron Low Profile Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA^® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision 0.02% Positioning Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions


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M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage

Hybrid Motor System Combines Advantages of Piezoelectrics and Electromagnetic Drives
2 Nanometer Linear Encoder Resolution
High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
Active Compensation of Stick/Slip During Startup and Settling
Active Backlash Compensation
Excellent Velocity Control
millisec ond Settling to Nanometer Accuracy
Reliable Execution of Minimal Increments


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Microscope Stages, Z-/Tip/Tilt Stages (with Aperture)
P-736 PInano™ Z, Low Profile, Low Cost, High-Speed Piezo-Z Slide Scanner
		Extremely Fast Step & Settle, From 5 msec Low Profile for Easy Integration: 20 mm (0.8") 100 and 200 µm Travel Ranges Longest Lifetime with Proprietary PICMA® Piezo Technology Cost Effective due to Low-Cost Piezoresistive Sensors Compatible w/ Leading Image Acquisition Software Packages Closed-Loop Control for High Repeatability and Accuracy 24 Bit USB Controller & Software Included


Online Datasheet

P-737 PIFOC^® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning
		High-Speed Piezo Z-Motion with Travel Ranges to 250 µm Nanometer Resolution Large Clear Aperture to Accommodate Specimen Holders Perfect Mechanical Fit to XY OEM Manual or Motorized Stages Sub-millisec ond Response Times


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P-545 PInano™ XY & XYZ 1x3 Piezo Stage Systems
		Low Profile for Easy Integration: 20 mm (0.8“) Large Aperture for 1x3"Slides. Accessories & Holders Available All Parts Black Anodized for Minimum Reflections 200µm Standard Travel Range, Longer Ranges Available Longest Lifetime with Proprietary PICMA® Piezo Technology Cost Effective due to Low-Cost Piezoresistive Sensors Compatible w/ Leading Image Acquisition Software Packages Closed-Loop Control for High Repeatability and Accuracy millisec ond Step Time, ideal for Super-Resolution Microscopy Recessed Sample Holders for Maximized Utility


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P-612 Compact Piezo Elevation Stage with Aperture
		Small Footprint: 60 x 60 mm For Cost-Sensitive Applications 100 Micron Travel Range Resolution to 0.2 Nanometer Clear Aperture : 20 x 20 mm PICMA® High-Performance Multilayer Piezo Actuators


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P-541.ZSL Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy
		Lower Profile for Easy Integration: 16.5 mm Z and Tip/Tilt Versions Fast Response 100 Micron Linear Travel Range 80 x 80 mm Clear Aperture PICMA^® High-Performance Multilayer Piezo Actuators for Superior Lifetime Combination with Long Travel Microscopy Stages


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P-541.ZCD Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology

Lower Profile for Easy Integration: 16.5 mm
Z and Tip/Tilt Versions
Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
100 Micron Linear Travel Range, 1 milliradian Tilt
80 x 80 mm Clear Aperture
PICMA^® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging


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P-528 Z/Tip/Tilt Flexure Nanopositioning / Scanning Piezo Stages with Parallel Metrology

Picture - Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology

Precision Trajectory Control
Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron / 4 milliradian
Clear Aperture 66 x 66 mm
Direct Metrology with Capacitive Sensors for Highest Precision
PICMA^® High-Performance Multilayer Piezo Drives


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PIFOC^® Objective Scanners
P-720 PIFOC^® High-Speed Microscope Objective Nanofocusing/Scanning Z-Piezo Drives
		Scans and Positions Objectives with Sub-Nanometer Resolution Low Inertia for Fast Settling Frictionless Precision Flexure Guiding System Travel to 100 Micron Straightness of Travel ≤13 microradian PICMA^® High-Performance Multilayer Piezo Drives


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P-721 PIFOC^® High-Speed Nanofocusing/Scanning Z-Piezo-Stage with Direct Metrology
		Scans and Positions Objectives with Sub-Nanometer Resolution High Linearity and Stability with Direct-Measuring Sensors Travel to 100 Micron, fast Settling Time Very Straight Motion for Enhanced Focus Stability Ask about DIC Prism Holder Option Compatible with Metamorph^TM Imaging Software Quick Lock Adapter for Easy Attachment


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P-725 PIFOC^® Long-Range, High-Speed Nanofocusing Z-Drives with Direct Metrology
		Scans and Positions Objectives with Sub-Nanometer Resolution High Linearity and Stability with Direct-Measuring Capacitive Sensors Travel to 460 Micron, Fast Response & Settling Time Frictionless Precision Flexure Guiding System Enhanced Guiding Precision for Better Focus Stability Ask about DIC Prism Holder Option Controller Compatible with Metamorph^TM Imaging Software Quick Lock Adapter for Easy Attachment


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Multi-Axis Stages without Aperture
P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems
		Small Footprint: 44 x 44 mm 100 Micron Travel Range Resolution to 0.2 Nanometer For Cost-Sensitive Applications PICMA^® High-Performance Multilayer Piezo Actuators Open- and Closed-Loop Models


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P-611.1 · P-611.2 Compact X and XY Piezoelectric Nanopositioning Systems
		Small Footprint: 44 x 44 mm 100 Micron Travel Range Resolution to 0.2 Nanometer For Cost-Sensitive Applications PICMA^® High-Performance Multilayer Piezo Actuators Z-Stage also Available


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P-281 Modular XY and XYZ Piezo Flexure Nanopositioning Stages
		Cost-Effective XZ (XY) & XYZ Positioning Travel Ranges to 100 x 100 x 100 Micron


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P-620.2 – P-629.2 PIHera^® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
		XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA^® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions


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P-363 PicoCube^® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM
		Ultra-High-Performance Closed-Loop Scanner for AFM/SPM Compact Manipulation Tool for Nanotechnology Resonant Frequency 9.8 kHz Ultra-High-Precision Capacitive Feedback Parallel-Motion Metrology for Highest Linearity and Stability 50 Picometers Resolution 5 x 5 x 5 Micron Travel Range Very Small Package Rugged Design


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P-611.3S · P-611.3O NanoCube^® XYZ Nanopositioning Piezo System
		100 x 100 x 100 Micron Travel Range Very Compact: 44 x 44 x 44 mm 1 Nanometer Resolution Ideal for Fiber-Alignment and Photonics Packaging Applications Optional E-760 Controller Card Features Built-In Optical Metrology Closed- and Open-Loop Versions Flexure-Guided Precision Trajectory Control Fast Scanning and Settling Large Variety of Controllers


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P-587 Six-Axis, Long-Travel Nanopositioning / Scanning Piezo-Stage with Parallel Metrology
		For Scanning and Positioning in all Six Degrees of Freedom 800 x 800 x 200 Micron Linear Range Up to 10 mad Rotational Range Precision Trajectory Control Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Direct Metrology with Capacitive Sensors for Highest Precision ID-Chip for Auto Calibration Function PICMA^® High - Performance Multilayer Piezo Drives


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Multi-Axis Piezo-Stages with Aperture
P-713 Low-Profile OEM XY Piezo-Scanners for Imaging Applications
		Ideal for Interlacing, CCD Resolution Enhancement Compact Size of only 45 x 45 x 6 mm Clear Aperture Highly Cost - Efficient Design 15 x 15 Micron Travel Range Parallel - Kinematics Design for Higher Dynamics


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P-612.2 Compact XY Piezo-Nanopositioner with Aperture
		Small Footprint : 60 x 60 mm 100 x 100 Micron Travel Range Resolution to 0.8 Nanometer For Cost-Sensitive Applications Clear Aperture: 20 x 20 mm PICMA ^® High-Performance Multilayer Piezo Actuators Z-Stage also Available


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P-541.2SL Low-Profile, Parallel-Kinematics XY Piezo Stages for Scanning Microscopy
		Low Profile for Easy Integration: 16.5 mm Parallel Kinematics for Fast Response To 200 x 200 Micron Travel Range 80 x 80 mm Clear Aperture PICMA^® High-Performance Multilayer Piezo Actuators for Superior Lifetime


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P-542.2CD Low-Profile, Scanning Microscopy XY Piezo Stages with Parallel Metrology
		Low Profile for Easy Integration: 16.5 mm Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance) To 200 x 200 Micron Travel Range Direct Drive Version for High-Speed Positioning & Scanning 80 x 80 mm Clear Aperture PICMA^® High-Performance Multilayer Piezo Actuators for Superior Lifetime


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P-733 Ultra-High-Speed,XY / XYZ Scanning Microscopy Stages with Parallel Metrology
		Higher Speed Through Direct Drive Up to 2.2 kHz Resonant Frequency in X and Y 30 x 30 or 30 x 30 x 10 Micron Travel Range 100 Picometers Resolution Capacitive Sensors for Highest Linearity Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion Active Runout Compensation 50 x 50 mm Clear Aperture Frictionless Precision Flexure Guiding System PICMA^® High-Performance Multilayer Piezo Drives Vacuum Compatible Option


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P-733 XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology
		100 x 100 Micron Travel Range For XY Scanning & Positioning Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion Precision Flexure-Guiding System Integrated Capacitive Sensors for Resolution <0.3 Nanometer 50 x 50 mm Clear Aperture Ultra-High Vacuum Version Available Ultra-Fast XY and XYZ Versions Available PICMA^® High-Performance Multilayer Piezo Drives


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P-734 Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology
		Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy Low Bow: Flatness in the Low Nanometer Range Parallel-Kinematics/Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion 100 x 100 Micron Travel Range Direct-Metrology Capacitive Sensors for Higher Precision 56 x 56 mm Clear Aperture PICMA^®High-Performance Multilayer Piezo Drives


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P-517 · P-527 Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology
		XYΘ, XYZ and XY Versions Precision Trajectory Control Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 200 Micron Clear Aperture to 66 x 66 mm PICMA^® High-Performance Multilayer Piezo Drives


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P-615 NanoCube^® XYZ Piezo Nano Alignment Systemillisec with Parallel Metrology
		350 x 350 x 250 Micron Closed-Loop Travel Range Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions) 10 mm Clear Aperture PICMA^® High-Performance Multilayer Piezo Drives 1 Nanometer Resolution Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10^-6 hPa


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P-562 PIMars^TM XYZ Piezo Stages / Scanners with Parallel Metrology
		To 300 x 300 x 300 Micron Travel Range Parallel-Kinematics/Metrology for Enhanced Responsiveness / X-Y-Z Decoupling, Low Bow Direct Metrology with Capacitive Sensors for Highest Precision 66 x 66 mm Clear Aperture Six-Axis Custom Versions Ultra-Fast XY and XYZ Versions Available Ultra-High-Vacuum Versions up to 10^-9 hPa Available Invar, Super-Invar and Titanium Versions Available PICMA^® High-Performance Multilayer Piezo Drives


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P-545 PInano™ XY & XYZ 1x3 Piezo Stage Systems
		Low Profile for Easy Integration: 20 mm (0.8“) Large Aperture for 1x3"Slides. Accessories & Holders Available All Parts Black Anodized for Minimum Reflections 200µm Standard Travel Range, Longer Ranges Available Longest Lifetime with Proprietary PICMA® Piezo Technology Cost Effective due to Low-Cost Piezoresistive Sensors Compatible w/ Leading Image Acquisition Software Packages Closed-Loop Control for High Repeatability and Accuracy millisec ond Step Time, ideal for Super-Resolution Microscopy Recessed Sample Holders for Maximized Utility


Online Datasheet \| Download the Tools for Microscopy Catalog \| Controller Manual \| Request Quote

P-587 Six-Axis, Long-Travel Piezo Stage Nanopositioner with Parallel Metrology
		For Scanning and Positioning in all Six Degrees of Freedom 800 x 800 x 200 Micron Linear Range Up to 10 mad Rotational Range Precision Trajectory Control Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Direct Metrology with Capacitive Sensors for Highest Precision ID-Chip for Auto Calibration Function PICMA^® High - Performance Multilayer Piezo Drives


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NEXLINE^® / NEXACT^® Linear Nanopositioning Drives
N-310 Compact NEXACT^® OEM Piezo Stepping Motor with Long Travel Ranges
		20 mm Standard Travel Range Compact and Cost-Effective Design 0.03 Nanometers Resolution To 10 N Push/Pull Force Low Operating Voltage Self Locking, with no Heat Dissipation, Nanometer Stability Non-Magnetic and Vacuum-Compatible Working Principle


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N-111 NEXLINE^® OEM Linear Actuator Nanopositioning Over Long Travel, PiezoWalk^® Principle
		Travel Range 10 mm Resolutionto 0.025 Nanometers Open-Loop,5 Nanometers Closed-Loop Up To 50 N Force Generation and 70 N Holding Force Self-Locking at Rest, No Heat Generation Non-Magnetic and Vacuum-Compatible Working Principle Cleanroom Compatible


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N-216 NEXLINE^® Linear Actuator High-Force PiezoWalk^® Drive for Long-Range Nanopositioning
		Travel Range 20 mm Resolutionto 0.03 Nanometers Open-Loop, 5 Nanometers Closed-Loop Up to 800 N Holding Force Self-Locking at Rest Non-Magnetic and Vacuum-Compatible Working Principle Cleanroom Compatible