Piezo Stages for Nanopositioning & Scanning
(Flexure-Guided Piezo Stage)

Single Axis Stages Z-Stages & Actuators Microscope Stages Objective Scanners Multi-Axis no Aperture
Multi-Axis, Aperture Motor Drives Tip/Tilt Mirrors Motor Stages/Actuators Piezo Controllers
Piezo-Motor-Driven Stages (Long Travel)
 

Piezo Flexure Mechanic stages provide high speed, nanometer resolution and high accuracy. They are used for applications requiring precision motion in one or more degrees of freedom. PI is the global leader in design and manufacture of piezoelectric nanopositioning and scanning stages.

Advantages of PI Piezo Stage systems are: frictionless flexure designs, parallel kinematics (better multiaxis trajectory control), parallel metrology (keeps motion of all controlled axes inside the servo loop), capacitive feedback (direct measuring, non contact), digital control (wider dynamic range, better linearity, autocalibration…).

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Catalog: Planar Piezo Stage for AFM
 




Single Axis Piezo Stage Nanopositioning Systems


PIHera® Mini Piezo-Stage, Long Travel, Direct Metrology
Picture - PIHera Miniature Long-Range Piezo Nanopositioner Stages with Direct Metrology
  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • Long-Life Multilayer Piezo Drives, Low Voltage
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Piezo Stage Datasheet




P-712 Low-Profile OEM Piezo Scanner
Picture - Compact OEM PZT Nanopositioning Stage
  • High Dynamics, 5 millisec Settling Time
  • 30 µm Travel Range
  • Resolution to 0.2 nm
  • Compact Design, Low Profile, 40 x 40 x 6 mm
  • Clear Aperture, 25 x 15 mm
  • PICMA® Long Life Piezo Drives
Back to Top Piezo Stage Datasheet




P-752 Piezo NanoAutomation® Stages with Direct Metrology
Picture - Ultra-Compact Open-Loop PZT Nanopositioning Stage
  • Ultra-Fast Response
  • Ultra-Precise Trajectory Control
  • Digital Controllers with Fast FiberLink Interface Available
  • ID-Chip for AutoCalibrate Function
  • Direct-Metrology Capacitive Sensors for Highest Precision
  • 0.1 Nanometers Resolution
  • PICMA® High-Performance Multilayer Piezo Drives
Piezo Stage Datasheet




P-753 LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology
Picture - Ultra-Compact Open-Loop PZT Nanopositioning Stage
  • Unique Design: Both Piezo-Stage and Piezo Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 Nanometers Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA® High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available
Back to Top       Piezo Stage Datasheet




P-750 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
Picture - High-Load Piezo-Driven Nanopositioning Piezo Stage with Direct Metrology
  • 10 kg Load Capacity
  • 1 Nanometer Lateral Guiding Precision
  • Resolution <1 Nanometer
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Fast Response
  • 75 Micron Travel Range
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Frictionless Precision Flexure Guiding System
Piezo Stage Datasheet




P-601 High-Precision Lever Amplified Z-Actuator with Flexure Guiding
Picture - PiezoMove High-Precision Lever Amplified Z-Actuator with Flexure Guiding
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Micron
  • Resolution to 0.2 Nanometer
  • High Dynamics and Stiffness
  • PICMA® High-Performance Piezo Actuators
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications
Back to Top Piezo Stage Datasheet




P-602 Flexure Actuator with High Stiffness. Integrated Guiding System, High Force and Large Travel Ranges
Picture - PiezoMove High-Precision Actuator with Flexure Guiding
  • Frictionless Flexure Guiding System for Straight Motion Integrated Motion
  • Amplifier for Travel Ranges to 1 mm
  • High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
  • Ideal for OEM-Applications in Adaptronics, Biotechnology or Microfluidics
Back to Top Piezo Stage Datasheet




P-603 Linear Actuator: Low-cost and with Large Travel Ranges
Picture - PiezoMove High-Precision Lever Amplified with Flexure Guiding
  • Frictionless, High-Precision Flexure Guiding System
  • Travel Ranges to 500 µm
  • Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
Back to Top Piezo Stage Datasheet




P-620.Z · P-621.Z · P-622.Z PIHera Piezo-Z Nanopositioning Stages with Direct Metrology
Picture - IHera Vertical Piezo Nanopositioner Stages with Direct Metrology
  • Z-Axis Travel to 400 Micron
  • Low Profile
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 0.02% Positioning Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Piezo Stage Datasheet




M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage
Picture - M-714 Hybrid Piezo Z-Stage
  • Hybrid Motor System Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • millisec ond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
Back to Top Piezo Stage Datasheet




Microscope Stages, Z-/Tip/Tilt Stages (with Aperture)

P-736 PInano™ Z, Low Profile, Low Cost, High-Speed Piezo-Z Slide Scanner
Picture - PInano™ Z, Low Profile, Low Cost, High-Speed Piezo-Z Slide Scanner
  • Extremely Fast Step & Settle, From 5 msec
  • Low Profile for Easy Integration: 20 mm (0.8")
  • 100 and 200 µm Travel Ranges
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • 24 Bit USB Controller & Software Included
Piezo Stage Datasheet




P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning
Picture - P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning
  • High-Speed Piezo Z-Motion with Travel Ranges to 250 µm
  • Nanometer Resolution
  • Large Clear Aperture to Accommodate Specimen Holders
  • Perfect Mechanical Fit to XY OEM Manual or Motorized Stages
  • Sub-millisec ond Response Times
Piezo Stage Datasheet




P-545 PInano™ XY & XYZ 1x3 Piezo Stage Systems
Picture - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology
  • Low Profile for Easy Integration: 20 mm (0.8")
  • Large Aperture for 1x3"Slides. Accessories & Holders Available
  • All Parts Black Anodized for Minimum Reflections
  • 200µm Standard Travel Range, Longer Ranges Available
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • millisec ond Step Time, ideal for Super-Resolution Microscopy
  • Recessed Sample Holders for Maximized Utility
Piezo Stage Datasheet | Download the Tools for Microscopy Catalog | Controller Manual | Request Quote




P-612 Compact Piezo Elevation Stage with Aperture
Picture - Compact Piezo Elevation Stage with Aperture
  • Small Footprint: 60 x 60 mm
  • For Cost-Sensitive Applications
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • Clear Aperture : 20 x 20 mm
  • PICMA® High-Performance Multilayer Piezo Actuators
Back to Top Piezo Stage Datasheet




P-541.ZSL Low-Profile Z/Tip/Tilt Piezo Nanopositioner Stages for Microscopy
Picture - Low-Profile Z/Tip/Tilt Piezo Nanopositioner Stages for Microscopy
  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Fast Response
  • 100 Micron Linear Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Combination with Long Travel Microscopy Stages
Back to Top Piezo Stage Datasheet




P-541.ZCD Low-Profile Z/Tip/Tilt Piezo Nanopositioner Stages for Microscopy with Parallel Metrology
Picture - Low-Profile Z/Tip/Tilt Piezo Nanopositioner Stages for Microscopy with Parallel Metrology
  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • 100 Micron Linear Travel Range, 1 milliradian Tilt
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging
Piezo Stage Datasheet




P-528 Z/Tip/Tilt Flexure Nanopositioning / Scanning Piezo Stages with Parallel Metrology
Picture - Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 Micron / 4 milliradian
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives
Piezo Stage Datasheet




PIFOC Nanopositioning Stages for Objective Focusing


P-720 PIFOC Nanopositioning Stage for Objective Focusing
Picture - PIFOC High-Speed Microscope Objective Nanofocusing/Scanning Z-Drives
  • High Speed Focusing and Scanning for Objectives with Nanometer Resolution
  • Low Inertia for Fast Settling
  • Frictionless Precision Flexure Guiding System
  • Travel to 100 Micron
  • Straightness of Travel ≤13 microradian
  • PICMA® High-Performance Multilayer Piezo Drives
Back to Top Piezo Stage Datasheet




P-721 PIFOC Nanopositioning Stage for Objective Focusing with Direct Metrology
Picture - PIFOC High-Speed Nanofocusing/Scanning Z-Drives with Direct Metrology
  • Fast Focusing and Scanning for Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Sensors
  • Travel to 100 Micron, fast Settling Time
  • Very Straight Motion for Enhanced Focus Stability
  • Ask about DIC Prism Holder Option
  • Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment
Piezo Stage Datasheet




P-725 PIFOC Nanopositioning Stage for Objective Focusing | Long-Travel Z-Drives, Direct Metrology
Picture - IFOC Long-Range, High-Speed Nanofocusing Z-Drives with Direct Metrology
  • Fast Focusing and Scanning for Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Capacitive Sensors
  • Travel to 460 Micron, Fast Response & Settling Time
  • Frictionless Precision Flexure Guiding System
  • Enhanced Guiding Precision for Better Focus Stability
  • Ask about DIC Prism Holder Option
  • Controller Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment
Piezo Stage Datasheet




Multi-Axis Stages without Aperture


P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems
Picture - Compact Z and XZ Piezoelectric Nanopositioning Systems
  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models
Piezo Stage Datasheet




P-611.1 · P-611.2 Compact X and XY Piezoelectric Nanopositioning Systems
Picture - Compact X and XY Piezoelectric Nanopositioning Systems
  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
Piezo Stage Datasheet




P-620.2 - P-629.2 PIHera Long-Range XY Piezo Nanopositioner Stages with Direct Metrology
Picture - PIHera Long-Range XY Piezo Nanopositioner Stages with Direct Metrology
  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Piezo Stage Datasheet




P-363 PicoCube® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM
Picture - PicoCube High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM
  • Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
  • Compact Manipulation Tool for Nanotechnology
  • Resonant Frequency 9.8 kHz
  • Ultra-High-Precision Capacitive Feedback
  • Parallel-Motion Metrology for Highest Linearity and Stability
  • 50 Picometers Resolution
  • 5 x 5 x 5 Micron Travel Range
  • Very Small Package
  • Rugged Design
Piezo Stage Datasheet




P-611.3S · P-611.3O NanoCube® XYZ Nanopositioning Piezo System
Picture - NanoCube XYZ Piezo Nanopositioning Systems
  • 100 x 100 x 100 Micron Travel Range
  • Very Compact: 44 x 44 x 44 mm
  • 1 Nanometer Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers
Back to Top Piezo Stage Datasheet




Multi-Axis Piezo-Stages with Aperture


P-713 Low-Profile OEM XY Piezo-Scanners for Imaging Applications
Picture - Low-Profile OEM XY Piezo-Scanners for Imaging Applications
  • Ideal for Interlacing, CCD Resolution Enhancement
  • Compact Size of only 45 x 45 x 6 mm
  • Clear Aperture
  • Highly Cost - Efficient Design
  • 15 x 15 Micron Travel Range
  • Parallel - Kinematics Design for Higher Dynamics
Piezo Stage Datasheet




P-612.2 Compact XY Piezo-Nanopositioner with Aperture
Picture - Compact XY Piezo-Nanopositioner with Aperture
  • Small Footprint : 60 x 60 mm
  • 100 x 100 Micron Travel Range
  • Resolution to 0.8 Nanometer
  • For Cost-Sensitive Applications
  • Clear Aperture: 20 x 20 mm
  • PICMA ® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
Back to Top Piezo Stage Datasheet




P-541.2SL Low-Profile, Parallel-Kinematics XY Piezo Stages for Scanning Microscopy
Picture - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology
  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics for Fast Response
  • To 200 x 200 Micron Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Piezo Stage Datasheet




P-542.2CD Low-Profile, Scanning Microscopy XY Piezo Stages with Parallel Metrology
Picture - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology
  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • To 200 x 200 Micron Travel Range
  • Direct Drive Version for High-Speed Positioning & Scanning
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Piezo Stage Datasheet




P-733 Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology
Picture - Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology
  • Higher Speed Through Direct Drive
  • Up to 2.2 kHz Resonant Frequency in X and Y
  • 30 x 30 or 30 x 30 x 10 Micron Travel Range
  • 100 Picometers Resolution
  • Capacitive Sensors for Highest Linearity
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Active Runout Compensation
  • 50 x 50 mm Clear Aperture
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Vacuum Compatible Option
Back to Top Piezo Stage Datasheet




P-733 XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology
Picture - XY Piezo Nanopositioning / Scanning Stages with Parallel Metrology
  • 100 x 100 Micron Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 Nanometer
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Piezo Stage Datasheet




P-734 Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology
Picture - Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology
  • Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
  • Low Bow: Flatness in the Low Nanometer Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion
  • 100 x 100 Micron Travel Range
  • Direct-Metrology Capacitive Sensors for Higher Precision
  • 56 x 56 mm Clear Aperture
  • PICMA®High-Performance Multilayer Piezo Drives
Piezo Stage Datasheet




P-517 · P-527 Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology
Picture - Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology
  • XYΘ, XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 Micron
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives
Back to Top Piezo Stage Datasheet




P-615 NanoCube® XYZ Piezo Nano Alignment Systemillisec with Parallel Metrology
Picture - NanoCube XYZ Piezo NanoAlignment Systemillisec with Parallel Metrology
  • 350 x 350 x 250 Micron Closed-Loop Travel Range
  • Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
  • Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
  • 10 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Drives
  • 1 Nanometer Resolution
  • Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10-6 hPa
Piezo Stage Datasheet




P-562 PIMarsTM XYZ Piezo Stages / Scanners with Parallel Metrology
Picture - PIMars XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology
  • To 300 x 300 x 300 Micron Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / X-Y-Z Decoupling, Low Bow
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Six-Axis Custom Versions
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Piezo Stage Datasheet




P-545 PInano™ XY & XYZ 1x3 Piezo Stage Systems
Picture - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology
  • Low Profile for Easy Integration: 20 mm (0.8")
  • Large Aperture for 1x3"Slides. Accessories & Holders Available
  • All Parts Black Anodized for Minimum Reflections
  • 200µm Standard Travel Range, Longer Ranges Available
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • millisec ond Step Time, ideal for Super-Resolution Microscopy
  • Recessed Sample Holders for Maximized Utility
Piezo Stage Datasheet




P-587 Six-Axis, Long-Travel Piezo Stage Nanopositioner with Parallel Metrology
Picture - Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology
  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 Micron Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives
Piezo Stage Datasheet




P-772 Ultra-Compact Piezo Stage NanoAutomation® System with Direct Metrology
Picture - Ultra-Compact Open-Loop PZT Nanopositioning Stage
  • Smallest Piezo Flexure-Guided Stage with Capacitive Direct Metrology Feedback
  • Ideal for Head/Media Test & Fiber Optics
  • Resolution <0.1 Nanometers
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID-Chip for Auto Calibrate Function
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
Piezo Stage Datasheet




Piezo-Motor-Driven Stages
Linear Piezo Motors    Piezo Actuators    Steering Mirrors    Multi-Axis Scanning Stages/Flexure Stages
    Piezo Controllers    DuraAct™ Patch Transducers


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