Piezo Driver / Nanopositioning Controller /
High-Voltage Amplifier Overview

High-Speed Digital
Piezo Controllers 		3-Channel
Nanocube Controllers		 High-Power Piezo Drivers to 2000W Controllers for Bender
Piezo Actuators		 OEM Piezo Controller
Modules
Modular Piezo Controllers 1- Channel Controllers
Amps & Cards		 Low-& High-Voltage Drivers Controllers for Steering Mirrors Piezo Controller Board

 

PI offers the largest selection of digital and analog piezo controllers, drivers and high-voltage amplifiers for piezoelectric actuation systems worldwide. Advantages: digital and analog controllers; 100 V and 1000 V amplifiers; modular, OEM and PC-plug-in designs; ultra-low-noise, high-stability servo-controllers; 1 W to 2000 W peak power; energy-recovery designs.

Piezo Products:
Piezo Actuators
Piezo Stages
Piezo Linear Motors
Piezo Steering Mirrors
Piezo Controllers
Piezo Patch Transducers

More Piezo Driver/Controller Information...
Selection Guides
Introduction, Applications
Reasons for Choosing PI
Test and Quality Control
 




High-Speed Digital Piezo Controllers


E-709 Affordable 1-Channel Digital Piezo Controller & Driver
Product Image - E-709
  • Low-Cost, yet High Performance
  • Fast Digital Controller, Software Configurable Servo Parameters
  • Improves Linearity of SGS and Piezoresistive Sensors to 0.02%
  • Digital Interfaces: USB, RS-232
  • Comprehensive I/O Functions
  • Additional High-Bandwidth Analog Control
  • Input / Sensor Input
  • Comprehensive Software Package
Back to Top E-709 Technotes | PDF Datasheet




E-753 Sophisticated 1-Channel Digital Piezo Controller & Driver
Product Image - E-753
  • Highest Performance, Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Task Triggering
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors
Product Description | Specs / Drawings | Ordering Info | PDF




E-761 3-Channel Digital Piezo Nanopositioning Controller & Driver in PCI-Board Format
Product Image - E-761 PCI Bus
  • For Closed-Loop Piezoelectric Nanopositioning Systems with Capacitive Sensors
  • High-Speed PCI Interface
  • Additional High-Bandwidth Analog Interface
  • 32-Bit Digital Filters
  • 24-Bit DAC Resolution
  • 2 Linearization Systems
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • ID-Chip Support for Automatic Calibration
  • Integrated Linear Amplifiers
  • Extensive Software Package
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-710 Multi-Channel Digital Piezo Controller & Driver with Dynamic Linearization
Product Image - Multi-Channel Digital Piezo Controllers with Dynamic Linearization
  • For Piezo Nanopositioners with Capacitive Feedback Sensors
  • 3-, 4- & 6-Channel Versions
  • 32-Bit Digital Filters
  • Hardware and Firmware Linearization
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity
  • ID Chip Support for Automatic Calibration
  • Optional High-Speed Parallel I/O or DSP Interface
  • Optional Analog Input
  • Integrated Linear Amplifiers
  • GCS (General Command Set) Compatible
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-712 Modular Digital Piezo Controller System, up to 6 Axes
Product Image - Modular Digital Piezo Controller System, up to 6 Axes
  • Digital Controller of the Newest Generation: 600 MHz Processor; up to 50 kHz Sensor Update Rate;
  • Highly Stable 20-bit D/A Converters
  • Real-Time Operating System for Excellent Trajectory Control
  • Modular Design for Greatest Flexibility in Meeting Custom Requirements
  • Auto-Calibrating from Stage ID-Chip for Interchangeability of Controller and Mechanics w/o Recalibration
  • Flexible Interfacing: USB, RS-232 & Ethernet
  • Optional High-Bandwidth Analog Inputs and Outputs
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-612 High-Speed NanoAutomation® Piezo Controllers & Drivers
Product Image - High-Speed NanoAutomation Piezo Controllers
  • 10 microsecond Parallel Command Port
  • OEM Modules and Bench-Top Versions
  • Controls Low-Voltage Piezo NanoPositioners with Capacitive Sensors
  • Opto-Isolation for EMI Immunity
  • Integrated PZT Power Amplifier
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




3-Channel Nanocube Controllers & Drivers


E-664 NanoCube® Piezo Controller & Driver
Product Image - NanoCube Piezo Controller
  • 3 x 14 W Peak Power
  • Position Servo-Control
  • For P-611 NanoCube® NanoPositioning Systems
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-760 NanoCube® Piezo Controller & Driver Card for F-206 / C-880 Controller
NanoCube Piezo Controller Card for F-206 / C-880 Controller
  • Specially Designed for P-611 NanoCube®and F-206 HexAlign™ 6D Alignment System
  • Built-in Optical Metrology for Automatic Alignment
  • Integrated Linear Amplifiers with 3 x 9 W Peak Power
  • Position Servo-Control
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




High-Power Amplifiers 500 to 2000 W


E-481 High-Power High-Voltage Piezo Driver / Controller with Energy Recovery
Product Image - High-Power HVPZT Piezo Amplifier / Controller with Energy Recovery
  • High-Voltage Amplifier with 2000 W Peak Power
  • Energy Recovery
  • Output Voltage 0 to ±1000 V and bipolar
  • Optional Position Servo-Controller Module
  • Optional Computer Interface and Display Module
  • Differential Output
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-471 High-Power, Modular HVPZT (1000 V) Piezo Drivers / Controllers
Product Image - High-Power, Modular HVPZT Piezo Drivers / Controllers
  • Integrated Linear High-Voltage Amplifier w/ 550 W Peak Power
  • Output Voltage -3 to -1100 V & Bipolar
  • 1- and 2-Channel Versions
  • Optional Position Servo-Control Modules
  • Optional USB, RS-232 & IEEE 488 Interface Module & Display
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




Controllers for Bender Piezo Actuators


E-651 Piezo Controller & Driver for Closed-Loop Low-Voltage Piezo (60 V) Multilayer Bender Actuators
Product Image - Piezo Controller for Closed-Loop Low-Voltage Piezo Multilayer Bender Actuators
  • Controller for Closed-Loop Multilayer Bimorph Actuators
  • 1- and 2-Channel Versions
  • Integrated Linear Amplifiers
  • Bench-Top & OEM-Board Versions
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-650 Piezo Drivers for Low-Voltage Piezo (60 V) Multilayer Bender Actuators
Product Image - Piezo Drivers for Low-Voltage Piezo Multilayer Bender Actuators
  • Specifically Designed to Drive Multilayer Bimorph Actuators
  • Bench-Top and OEM Versions
  • Integrated Linear Amplifier w/ up to 18 W Peak Power
  • LCD Voltage Display
  • Output Voltage ±30 V or 0 to 60 V and Separate Fixed Voltage
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




OEM Controller Modules


E-413 Compact Piezo Amplifier for DuraAct™ Patch Transducers and PICA™ Shear Piezo Actuators
Product Image - Low-Voltage Piezo Piezo Driver & Position Servo-Controller Modules, OEM Version
  • Peak Power to 50 W
  • OEM Module / Bench-Top for PICA™ Shear Actuators
  • OEM Module for DuraAct™ Piezoelectric Patch Transducers
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-610 LVPZT (100 V) Piezo Linear Amplifier & Position Servo-Controller Modules, OEM Version
Product Image - Low-Voltage Piezo Piezo Driver & Position Servo-Controller Modules, OEM Version
  • Open-Loop and Closed-Loop Versions
  • For Capacitive, Strain Gauge and LVDT Sensors
  • Integrated Linear Amplifier w/ 14 W Peak Power
  • Runs on Single Stabilized Voltage (12 to 30 VDC
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-621 LVPZT (100 V) Piezo Amplifier & Servo-Controller Module with
   High-Speed USB Interface
Product Image - Low-Voltage Piezo Piezo Driver & Servo-Controller Module with High-Speed USB Interface
  • Integrated 24-Bit USB Interface
  • Network Capability with up to 12 Channels
  • Up to 12 W Peak Power
  • Position Control with Strain Gauge or Capacitive Sensor
  • Notch Filter for Higher Bandwidth
  • Additional Analog Interface
  • Table for User-Defined Curves
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-831 OEM Piezo Driver and Power Supply Modules
Product Image - OEM Piezo Driver and Power Supply Modules
  • Cost Effective Piezo Driver
  • Small Size
  • Low Noise, High Stability
  • Easy-to-Use
  • Full Overcurrent, Short-Circuit and Temperature Protection
  • Power-up/down Without Voltage Spikes
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-462 HVPZT (1000 V) Piezo Drivers
Product Image - HVPZT Piezo Drivers
  • Single Channel Piezo Driver
  • 12 V Battery or P/S Operation
  • Output Voltage Range +10 to +1000 V
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-660 LVPZT (100 V) Piezo Drivers
Product Image - Low-Voltage Piezo Piezo Drivers
  • Single-Channel Piezo Driver
  • 12 V Battery or P/S Operation
  • Output Voltage Range 5 to 100 V
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




Modular Controllers


E-500 Modular Piezo Driver / Controller for Low-Voltage (100 V) and High-Voltage (1000 V) & Systems
Product Image - Modular Piezo Control Systems (HVPZT & Low-Voltage Piezo)
  • For High- and Low-Voltage Piezo Systems
  • 19- and 9.5-Inch Chassis
  • Choice of Linear Amplifier Modules
  • Optional Position Servo-Control Modules
  • Optional Display and RS-232 & IEEE 488 Interface Module
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-536 PicoCube® Piezo Controller
PicoCube® Piezo Controller
  • Extremely Low Noise: Resolution to 25 Picometers
  • For P-363 PicoCube® Systems
  • Peak Power 3 x 100 W
  • Ultra-Low Noise
  • Output Voltage ±250 V
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-509 Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems
Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems
  • Position Servo-Control for Piezo-Driven Nanopositioning Systems
  • Improves Linearity
  • Eliminates Drift & Hysteresis
  • For Capacitive Sensors, Strain Gauge Sensors & LVDT Sensors
  • Increases Piezo Stiffness
  • Notch Filter for Improved Dynamics
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-508 High-Voltage Piezo Driver (1000 V) Module
Product Image - HVPZT Piezo Driver Module
  • Integrated Linear Amplifier, up to 400 W Peak Power
  • Output Voltage Range +3 to +1100 V & Bipolar
  • ±250 V for Shear Actuators
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-517 Digital Piezo Controller Operation Module
Computer Interface and Display Module for Modular Piezo Controllers
  • Macro Command Language / Stand-Alone Functionality
  • Low-Noise 24-bit D/A Converter
  • Sample Rate 25 kHz
  • TCP/IP, USB, IEEE 488 and RS-232 Interfaces
  • 6-Digit Display for Voltage and Position
  • 1- & 3-Channel Versions
  • Wave Generator with Programmable Trigger-I/O
  • Module for E-500 Piezo Controller Rack
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-503 LVPZT (100 V) Piezo Driver Module, 3 Channels
LVPZT Piezo Driver Module, 3 Channels
  • Integrated Linear Amplifiers, 3 x 14 W Peak Power
  • Output Voltage Range -20 to +120 V
  • E-503.00S with 2 amplifier channels and one fixed voltage of +100 V
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-515 Display Modules for Modular Piezo Controllers
Display Modules for Modular Piezo Controllers
  • 3 1/2-digit LED Display
  • For Voltage & Displacement Data
  • 1- & 3-Channel Versions
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




Single Channel Piezo Drivers / Controllers / Cards


E-621 LVPZT (100 V) Piezo Amplifier & Servo-Controller Module, High-Speed USB Interface
Product Image - LVPZT Piezo Driver & Servo-Controller Module with High-Speed USB Interface
  • Integrated 24-Bit High-Speed USB Interface
  • Integrated Linear Amplifier, 14 W Peak Power
  • Network Capability with up to 12 Channels
  • For Capacitive, LVDT and Strain Gauge Position Sensors
  • GCS (General Command Set) Compatible
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-610 LVPZT (100 V) Piezo Driver & Position Servo-Controller Modules, OEM Version
Product Image - LVPZT Piezo Driver & Position Servo-Controller Modules, OEM Version
  • Open-Loop and Closed-Loop Versions
  • For Capacitive, Strain Gauge and LVDT Sensors
  • Integrated Linear Amplifier, 14 W Peak Power
  • Runs on Single Stabilized Voltage (12 to 30 VDC)
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface
Product Image - LVPZT Piezo Driver / Servo-Controller with Fast RS-232 Interface
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 12 Channels
  • Integrated Linear Piezo Driver with 36 W Peak Power
  • SGS, LVDT and Capacitive Sensor Servo-Control
  • Table for User-Defined Curves
  • GCS (General Command Set) Compatible
  • UL and CSA certified
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface
Product Image - Compact LVPZT Piezo Amplifier & Servo-Controller with High-Speed RS-232 Interface Interface
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Integrated Linear Piezo Driver, 14 W Peak Power
  • Network Capability with up to 4 Channels
  • For Capacitive, LVDT and Strain Gauge Position Sensors
  • Wave Table for User-Defined Curves
  • GCS (General Command Set) Compatible
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-753 High-Speed Digital Piezo NanoAutomation® Controller
Product Image - High-Speed Digital Piezo NanoAutomation Controller
  • Next Generation Digital Controller Provides Higher Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Automatic Calibration Data Coaching from Stage ID-Chip
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Triggering Tasks
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Controller/Driver
Product Image - High-Speed Digital Piezo NanoAutomation Controller
  • For NEXACT® Drives and Positioning Systems
  • Complete System with Controller, Integrated Power Amplifiers and Software
  • Open-Loop Operation, or Closed-Loop with Linear Encoder
  • High Performance at Low Cost
  • Daisy-Chain Networking for Multi-Axis Operation
  • Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
  • I/O for Automation, Joystick for Manual Operation
  • Parameter Changes On-the-Fly
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-862 Low-Cost NEXACT® Drive Electronics
Product Image - High-Speed Digital Piezo NanoAutomation Controller
  • For NEXACT® PiezoWalk® Drives & Stages
  • Combined Step Generator and Power Amplifier
  • Cost-Effective Design
  • Interface for Automation, Joystick for Manual Operation
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




C-867 Controller for PILine® Piezo Linear Drives
  • Optimized for PILine® Ultrasonic Piezo Linear Motors
  • High-Bandwidth Encoder Inputs Allow High Speed and Resolution
  • PID Servo-Control with Dynamic Parameter Switching
  • Integrated Piezo Motor Power Driver
  • USB, RS-232 and Analog Interfaces (e.g. for Joystick)
  • 4 + 4 Programmable TTL-I/Os for Flexible Automation
  • Data Recorder
  • Daisy-Chain Networking for up to 16 Axes
  • Powerful Macro Programming Language, e.g. for Stand-Alone Operation
  • Extensive Software Support, LabVIEW, DLL ...
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




C-184 · C-185 PILine® Drive Electronics OEM Boards and Stand-Alone Units for Ultrasonic Piezomotors
  • For PILine® Ultrasonic OEM Motors and Positioners
  • Accepts Analog Drive Signal from Standard Controller
  • Available as Cost-Effective OEM board and Plug-and-Play Desktop Unit
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




Open-Loop Piezo Drivers


E-663 LVPZT Low Voltage (100 V) Piezo Driver, 3 Channels
Product Image - LVPZT Piezo Amplifier, 3 Channels
  • 3 Independent Channels
  • Integrated Linear Amplifiers, 3 x 14 W Peak Power
  • 3 LED Voltage Displays
  • Output Voltage Range - 20 to 120 V
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




E-464 High-Voltage Piezo Driver (1000 V), 3 Channels
Product Image - HVPZT Piezo Amplifier, 3 Channels
  • 3 Independent Channels
  • Integrated Linear Amplifiers, 3 x 25 W Peak Power
  • 3 LED Voltage Displays
  • Output Voltage Range 0 to + 1000 V
Back to Top Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




Controller for Fast Steering Mirrors


E-616 Controller for Multi-Axis Piezo Tip/Tilt Mirrors and Platforms
Product Image - E-616 Controller for Multi-Axis Piezo Tip/Tilt Mirrors and Platforms
  • Three Integrated Amplifiers Provide up to 10 W Peak Power
  • Closed-Loop and Open-Loop Versions
  • Internal Coordinate Transformation Simplifies Control of Parallel Kinematics Designs (Tripod & Differential Drive)
  • Compact and Cost-Effective Design for OEMs or Bench-Top
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet




Accessories


E-530 Power Supply Accessories
Product Image - Power Supply for E-500 Systems
  • Included in E-500 Chassis
  • Provides Power for all E-500-Installable Modules
  • 90-264 VAC Operating Range
Online Datasheet | Specs & Drawings | Models & RFQ | PDF Datasheet








Linear Piezo Motors    Piezo Actuators    Steering Mirrors    Multi-Axis Scanning Stages/Flexure Stages
    Piezo Controllers    DuraAct™ Patch Transducers
Resources
Up to date