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| Piezo Actuators and Systems for High Tech Applications
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| NEXLINE® Nano positioning Actuators |
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| N-111 NEXLINE® Miniature High-Load Piezo Nano positioning Drive
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- Winner of the SEMI Technology Innovation Showcase Award
- 5 mm Travel Range
- <0.1 Nano meter Resolution
- Active Force Generation to 30 N
- >80 NewtonHolding Force Self-Locking
- Non Magnetic Option
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PDF Files
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Online Catalog
N-110
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| N-214 NEXLINE® High-Load Piezo Nanopositioning Actuator
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- Winner of the SEMI Nano Technology Innovation Showcase Award
- 20 mm Travel Range, <0.1 Nano meter Resolution
- Integrated High-Resolution Incremental Encoder
- Active Force Generation to 400 Newton
- >600 NewtonHolding Force, Self-Locking
- Non Magnetic Option
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PDF Files
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Online Catalog
N-214
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| Ultrasonic Linear Actuators / Motors |
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| M-674 PILine® RodDrive PiezoMotor Actuators
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- Drive-Component for Integration into Precision Positioning Systems
- Flexible Choice of Travel Ranges to Several 100 mm
- Flexible Choice of Push/Pull Forces to Several 10 Newton
- Minimum Incremental Motion to 50 Nano meters
- Velocity to 400 mm/s
- Self-Locking
- Non Magnetic Option
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| P-653 PILine® Micro Piezo Linear Slide / Motor Actuator
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- Cost-Effective, High-Volume-Production Drive
- Piezo Micro-Motor: Only 8 mm Long
- Travel Range 2 mm
- Velocity to 200 mm/s
- Self-Locking
- Non Magnetic Option
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PDF Files
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Online Catalog
P-653
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| P-661 PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs
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- Patented Principle Features Very Compact Dimensions
- Velocity to 600 mm/s
- Acceleration to 15 g
- Minimum Incremental Motion to 50 Nano meters
- Self-Locking to 1.5 Newton
- 20000 h MTBF
- Non Magnetic Option
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PDF Files
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Online Catalog
P-661
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| M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motor Actuators
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- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 Nano meter
- Self-Locking
- XY-Combinations Available
- 20000 h MTBF
- Vacuum Versions to 10-7 hPa
- Non Magnetic Option
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| M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
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- Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
- 20 mm Travel Range
- Velocity up to 500 mm/s
- Accelerations up to 20 g
- Resolution to 100 Nano meters
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- XY Combinations Available
- 20000 h MTBF
- Vacuum Versions Available
- Non Magnetic Option
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PDF Files
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Online Catalog
M-663
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| PMR 40.08 Rotary Piezo Motors |
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- Non Magnetic
- For Low-Speed Applications
- Suited for Hazardous Environments
- Excellent Start-Stop Performance
- Milliseconds Response Time
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Flexure-Guided Piezo Nano positioning Actuators
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| P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
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- Flexure Guidance for Frictionless, Ultra-Straight Motion
- Travel Ranges to 480 Microns
- Resolution to 0.2 Nano meters
- High Dynamics and Stiffness
- PICMA® High-Performance Piezo Actuators
- Open and Closed-Loop Versions
- Ideal for OEM Applications
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PDF Files
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Online Catalog
P-601
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| P-783 Piezoelectric Z-Nano positioning Stage / Actuator with Direct Metrology
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- Z-Axis Travel to 300 Micron
- Low Profile
- Frictionless Precision Flexure Guiding System
- Internal Motion Amplifier
- Closed-Loop Resolution <10 Nano meter
- PICMA® High-Performance Multilayer Piezo Drives
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| P-290 Long-Travel Piezoelectric Z-Nano positioning Flexure Stage / Actuator
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- Vertical Travel to 1000 Micron
- Integrated Double-Flexure Motion Amplifier
- Non-Magnetic Stainless Steel Design
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PDF Files
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Online Catalog
P-290
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| P-753 LISA Piezoelectric Nano Automation® Stages / Actuators with Direct Metrology
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- Unique Design: Both Stage and Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 Nano meter Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Multilayer Piezo Drives
- ID-Chip for Auto Calibrate Function
- Vacuum Versions Available
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PDF Files
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Online Catalog
P-753
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Piezo Linear Actuators & Benders
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| P-882 – P-888
PICMA® Low-Voltage High-Performance Monolithic Multilayer Piezo Tranducers
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- Award-Winning Low-Voltage Technology
- Low Operating Voltage
- Superior Lifetime Even Under Extreme Conditions
- Very Large Operating-Temperature Range
- High Humidity Resistance
- Excellent Temperature Stability
- High Stiffness
- UHV Compatible to 10-9 hPa
- Sub-Millisecond Response & Sub-Nano meter Resolution
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| P-245 Preloaded Piezo Tranducers |
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- Travel Range to 180 µm
- Pushing Forces to 4500 N
- Tensile Forces to 500 N
- Sub-ms Response
- Sub-Nano meter Resolution
- Options: Vacuum, High- and Low-Temperature
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| P-247 Preloaded High-Load Piezo Linear Actuators
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- Extremely High Stiffness
- Pushing Forces to 30,000 N
- Tensile Forces to 3500 N
- Travel Range to 120 µm
- Options: Versions for Vacuum, High- and Low-Temperatures and with Water-Resistant Case
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| P-840
Preloaded Low-Voltage Piezo Linear Translators (LVPZT)
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- Displacement to 90 µm
- Pushing Forces to 1000 Newton
- Preloaded for Tensile Forces to 50 N
- Sub-msec Response
- Sub-Nano meter Resolution
- Options: Ball Tip, Vacuum Versions
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| P-871
Closed-Loop, High-Deflection PICMA® Low-Voltage Multilayer Piezo Bender tranducers
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- Closed-Loop Operation for Superior Accuracy
- Nano meter-Range Resolution
- Deflection up to 1.6 mm
- Ceramic Insulation for Extended Lifetime
- Ideal for Scanning Applications
- Vacuum-Compatible Versions
- Low Voltage
- Mounting Hardware Included
- Special Controllers / Drivers Available
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PDF Files
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Online Catalog
P-871
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| P-286 Piezo Disk tranducers
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- Displacement to 200 µm
- Sub-Nano meter Resolution
- Low Cost
- Flat Design
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| PL022 PICMA® Chip Miniature Low-Voltage Piezo Actuators
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- Ceramic Encapsulation for Extended Lifetime
- Ultra-Compact, from 2 x 2 x 2 mm
- Low-Voltage, High Curie Temperature
- Ideal for Dynamic Operation
- Sub-Millisecond Response / Sub-Nano meter Resolution
- UHV Compatible to 10-9 hPa
- Superior Lifetime
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| P-007 – P-056
PICA™-Stack / High Force High Voltage Piezoceramic Linear Actuators
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- High Load Capacity to 100 kN
- High Force Generation to 80 kN
- Large Cross Sections to 56 mm Diameter
- Variety of Shapes
- Extreme Reliability >1000,000,000 Cycles
- Proven and Flexible Design
- Sub-Nano meter-Resolution / Sub-Millisecond-Settling-Time
- Vacuum-Compatible Versions
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