Piezo


Piezo Mechanisms & Piezo Mechanic Systems
for Precision Motion Applications (Mechatronics)





Piezo mechanisms can provide very fast and precise motion. PI and PI Ceramic are the leading manufacturers of mechatronic systems such as piezo actuators and pzt transducers for motion control, nano positioning and micropositioning applications in industries such as: Semiconductors; Biotechnology and Medicine; Lasers, Optics, Microscopy; Aerospace Engineering;Precision Machining; Astronomy and Microsystems Technology.

PI also provides value added manufacturing and custom assembly of piezo components and piezo systems for OEMs.
Piezo CatalogPiezo Mechanisms Catalog Piezo Products for Motion Control:
Piezo Flexure StagesPiezo Stages, Flexure Guided
Linear Piezo MotorsLinear Piezo Motors
Piezo ActuatorsPiezo Actuators
Steering MirrorsPiezo Tip/Tilt Steering Mirrors
Piezo ControllersPiezo Controllers
Patch TransducersDuraAct™ Patch Transducers


Piezo Catalogs / Papers
Piezo Mechanisms & ControllersPiezo Mechanisms & Controllers
Non Magnetic PositionersVacuum & Non Magnetic Positioners
Piezo MaterialsPiezo Materials & Components
Piezo Flexure Actuator Piezo Flexure Actuators
Piezo StagesPiezo Stages for AFM
Piezo AmplifiersPiezo Amplifiers, Drivers
Energy HarvestingEnergy Harvesting
Piezo Reliability PaperPiezo Reliability Paper

Designing with Piezoelectrics Piezo University: Designing with Piezo Mechanics

Different Types of Piezo Mechanisms Solve Different Problems

Not all piezo actuators and motors are created equal. There are a large variety of different designs optimized for different applications, from extremely high force or microsecond response, to long travel ranges in the millimeter and centimeter range.

Direct Piezo Actuators: Z-Stacks, Shear (X, XY)
Piezo Stack Actuator


  • Highest Force
  • Fastest Response
  • Travel Ranges 2-100 µm
Piezo Flexure Lever Actuators
Flexure Piezo Actuator


  • Flexure Guiding System
  • Response <1 msec
  • Travel to 2 mm, Compact


Ultrasonic Linear Motors
Ultrasonic Piezo Actuators


  • Long Travel (10s of millimeters)
  • Fast: 350 mm/sec
  • Low Profile, Self Locking
PiezoWalk® Linear Motors
Piezo-Walk Actuators


  • High Force (2 kg to 80 kg)
  • Compact, Self Locking
  • Long Travel (10s of millimeters)

All: Sterile, Low Power, No Lubricants, Non- Magnetic, Vacuum Compatible; High Resolution:
Sub-Nanometer to Sub-Micron


Piezo Effect /Different Types of Piezo Actuators / Video




Piezoelectric Actuator Tutorial

piezo actuator Piezo is derived from the Greek word piezein (to squeeze). It is quite often misspelled peizo. Piezoelectric actuators offer a solution to positioning tasks that require the highest accuracy, speed and resolution.

Examples given in this tutorial indicate a selection of the many applications common today. The relentless push for more accuracy and speed-whether in biotechnology / nanotechnology, the miniaturization of microelectronics, fiber optics or data storage devices-drives both the application and the further development of piezo technology.

Designing with Piezoelectric Actuators First Piezo Physics App for iPhone, iPad & Android
Designing with Piezoelectric Actuators Blog: More Information on the Piezo Physics App
Designing with Piezoelectric Actuators Tutorial: Piezoelectrics in Nanopositioning,
    Designing with Piezoelectric Actuators

Features and ApplicationsFeatures and Applications
Fundamentals of PiezomechanicsFundamentals of Piezomechanics, Actuators and Sensors
Fundamentals of Piezoelectric ActuatorsFundamentals of Piezoelectric Actuators
Control of Piezo ActuatorControl of Piezo Actuators and Stages
Parallel and Serial KinematicsParallel and Serial Kinematics, PMN Compared to PZT
White Paper: Piezo Technology White Paper: Piezo Technology in
    Active Vibration Cancellation

Piezoelectric / Motorized Actuator Solutions for Motion Control Applications

Nano Precision Piezo Actuators
Nano-Precision Piezo Actuators


Piezo Actuators Forces to 100 kN
Sub-Nano meter Resolution Sub-Nano meter
   Resolution
Fast Response Fast Response (to
   µsec -Range)
Extreme Lifetime Extreme Lifetime
Piezo Motor
Ultrasonic Piezo Linear
Actuators / Motors


Non Magnetic Non Magnetic
Velocity to 600 mm/s Velocity to 600 mm/s
Unlimited Travel Range Unlimited Travel
   Range
Forces to 30 N Forces to 30 N
piezo mechanisms Resolution to 50 Nanometer
Piezo Bender
Flexible Piezoelectric
Patch Transducers


Actuator & Sensor Actuator, Sensor,
   Energy Source
Highly Formable Ceramics Highly Formable
   Ceramics
Applied to Curved Surfaces Can be Applied to
   Curved Surfaces
Flexible Piezoelectric Patch Transducers Cost-Effective
Piezo Stepper Linear Motors
Piezo Stepper Linear Motors


Non Magnetic Non Magnetic
600 N Linear Motors Forces to 600 N
1 nm Resolution Linear Motor <1 nm Resolution
Auto Locking Auto-Locking PiezoWalk® Principle
linear actuator Travel to 20 mm
Guided Piezo Actuators
Flexure-Guided Piezo Actuators


Nanometer Resolution Sub-Nanometer
   Resolution
Fast Response Fast Response
   (msec -Range)
Excellent Guiding Precision Excellent Guiding
   Precision
Motion Control Applications Travel to 1 mm

Piezo Stepping Linear Actuators & Motors (NEXACT® / NEXLINE®)

N-310 NEXACT® OEM Miniature Linear Motor/Actuator
Miniature Linear Motor
  • 20 mm Standard Travel Range, Flexible Choice of the Runner Length
  • Compact and Cost-Effective Design
  • 0.03 nm Resolution**To 10 N Push/Pull Force
  • Low Operating Voltage
  • Self-Locking at Rest, No Head Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle

PDF Datasheet
Specs/Order Info
N-310 Miniature Piezo Linear Motor
Piezo Manipulator
N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper
Piezo Stepper Manipulator
  • Travel Range 30 mm Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self-Locking at Rest, no Heat Generation Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions

PDF Datasheet
Piezo Stepper PDF
Specs/Order Info
N-381 Piezo Stepper Manipulator

NEXLINE® Nanopositioning Actuators


N-111 NEXLINE®OEM High Force Piezo Motor with Long Travel
Linear Piezo Actuator with Long Travel
  • Winner of the SEMI Technology Innovation Showcase Award
  • 3 mm Travel Range
  • <0.1 Nanometer Resolution
  • Active Force Generation to 30 N
  • >50 N Holding Force Self-Locking
  • Non Magnetic Option

PDF Datasheet
PDF for Linear Actuator with Long Travel
Specs/Order Info
N-111 High Force Piezo Motor
N-216 NEXLINE® High-Load Piezo Nanopositioning Actuator
High-Load Piezo Nanopositioning Actuator
  • Travel Range 20 mm
  • Resolutionto 0.03 nm
  • Open-Loop, 5 nm Closed-Loop Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible

PDF Datasheet
PDF for High-Load Piezo Nanopositioning Actuator
Specs/Order Info
N-216 High-Load Piezo Nanopositioning Actuator

Ultrasonic Linear Actuators / Motors


PILine® RodDrive PiezoMotor Actuators
Piezo Ultrasonic Piezo Actuator
  • Drive-Component for Integration into Precision Positioning Systems
  • Flexible Choice of Travel Ranges to Several 100 mm
  • Flexible Choice of Push/Pull Forces to Several 10 Newton
  • Minimum Incremental Motion to 50 Nano meters
  • Velocity to 400 mm/s
  • Self-Locking
  • Non Magnetic Option

PDF Datasheet
PDF for Piezo Ultrasonic Piezo Actuator
Specs/Order Info
RodDrive Piezo Actuator
Back to Top
M-272 Linear Ultrasonic Shaft Motor
Piezo Shaft Linear Ultrasonic Motor
  • Easy Integration: Comes with Integrated Linear Encoder & Guiding System
  • High Speed to 200 mm/sec
  • High Force to 8 N
  • Very Stable: Self Locking with no Heat Generation

PDF Datasheet
PDF for Piezo Shaft Linear Ultrasonic Motor
Specs/Order Info
Linear Ultrasonic Shaft Motor
U-164 PILine® Ultrasonic Piezo Linear Motor
Piezo Ultrasonic Motor
  • Compact Patented Design: high speed & force
  • Easy Mounting
  • Max. Velocity 500 mm/s
  • Acceleration up to 5 g
  • Resolution 50 nm
  • Self-Locking
  • No Electro-Magnetic Fields

PDF Datasheet
PDF Piezo  Linear Ultrasonic Motor
Specs/Order Info
U-164 Ultrasonic Piezo Linear Motor
M-661 / M-662 PILine® Mini Linear Stage with Ultrasonic Piezo Motor
Piezo Stage with  Linear Ultrasonic Motor
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometers
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
  • Non Magnetic Option

PDF Datasheet
PDF Piezo Stage Linear Ultrasonic Motor
Specs/Order Info
Mini Linear Stage with Piezo Motor
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M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
Piezo Actuator Stage
  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel
  • To 500 mm/s fast
  • Acceleration to 20 g
  • Resolution to 100 Nanometer
  • Direct-Metrology: Linear Encoder
  • AutoLocking Design
  • XY-Stage Combinations
  • 20000 h MTBF
  • Vacuum Versions Available
  • Non Magnetic Option

PDF Datasheet
PDF Piezo Actuator Stage
Specs/Order Info
M-663 Closed-Loop Translation Stages

Flexure Piezo Actuators (Long Travel, Fast Response, Guided Motion)



P-601 PiezoMove® Piezo Flexure Z-Actuator
Piezo Flexure Actuator
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Microns
  • Resolution to 0.2 Nanometer
  • High Stiffness & Dynamics
  • Long Life PICMA® Multilayer Piezo Ceramics
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications

PDF Datasheet
PDF Piezo Flexure Actuator
Specs/Order Info
P-601 Piezo Flexure Z-Actuator
P-602 High Force Piezo Flexure Actuator
Piezo Flexure Actuator
  • Backlash-Free, Frictionless Flexure Guides for Straight Motion
  • Integrated Motion Amplifier for Travel Ranges to 1 mm
  • High Dynamics and Stiffness, Forces to 400 N,
  • Long Life PICMA® Multilayer Piezo Ceramics
  • Position Sensor Option
  • Custom Designs: Larger Travel, Faster Response, Non-Magnetic
  • OEM-Applications in Adaptronics, Biotechnology or Microfluidics

PDF Datasheet
PDF for Piezo Flexure Actuator
Specs/Order Info
P-602 High Force Piezo Flexure Actuator
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P-603 Low Cost Piezo Flexure Actuator
Low Cost Piezo Flexure Actuator
  • Zero Backlash, Frictionless, High-Precision Flexure Guiding System Travel Ranges to 500 µm
  • Cost-Effective & Long Life PICMA® Multilayer Piezo Ceramics
  • Position Sensor Option
  • Custom Designs: Larger Travel, Faster Response, Non-Magnetic
  • OEM-Applications in Adaptronics, Biotechnology or Microfluidics

PDF Datasheet
PDF for Low Cost Piezo Flexure Actuator
Specs/Order Info
P-603 Low Cost Piezo Flexure Actuator
Back to Top
P-753 LISA Closed-Loop Piezoelectric Nano Positioning Stages / Actuators with Direct Metrology
High Precision Piezo Flexure Actuator
  • Unique Design: Both Stage and Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 Nano meter Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • Long Life PICMA® Multilayer Piezo Ceramics
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available

PDF Datasheet
PDF for High PRecision Piezo Flexure Actuator
Specs/Order Info
P-753 Piezoelectric NanoPositioning Stage

Direct Piezo Linear Actuators & Piezo Benders



P-882 – P-888 PICMA® High-Performance Multilayer Piezo Stacks
Piezo Stack Actuator
  • Award-Winning Low-Voltage Technology
  • Superior Lifetime Under Extreme Conditions
  • Very Large Operating-Temperature Range
  • High Humidity Resistance
  • Excellent Temperature Stability
  • High Stiffness
  • UHV Compatible to 10-9 hPa
  • Sub-Millisecond Response & Sub-Nano meter Resolution

PDF Datasheet
PDF for Piezo Stack Actuator
Specs/Order Info
P-882 – P-888 High-Performance Piezo Stacks
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P-212 · P-216 & P-225 · P-235 Preloaded Encased PICA™ Power Piezo Stacks
Piezo Stack Actuator
  • Pushing Force to 4,500 N or 30,000 N
  • Travel Range to 180 µm
  • Pulling Force to 500 N or 3,500 N
  • Sub-millisecond Response
  • Sub-Nanometer Resolution
  • Options: Vacuum, High- and Low-Temperature

P-212 · P-216 PDF
PDF for Piezo Stack Actuator
Specs/Order Info / Order Info
P-212 · P-216 Preloaded Encased Piezo Stacks
P-225 · P-235 PDF
PDF for Piezo Stack Actuator
Specs/Order Info / Order Info
P-225 · P-235 Preloaded Encased Piezo Stacks
P-840 Preloaded Low-Voltage Piezo Stack Linear Actuators (LVPZT)
Preloaded Piezo Stack Actuator
  • Displacement to 90 µm
  • Pushing Forces to 1000 Newton
  • Preloaded for Tensile Forces to 50 N
  • Sub-millisecondec Response
  • Sub-Nano meter Resolution
  • Options: Ball Tip, Vacuum Versions

PDF Datasheet
PDF for Preloaded Piezo Stack Actuator
Specs/Order Info
P-840 · P-841 Piezo Stack Linear Actuators
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PICMA® Chip Piezo Stacks: Miniature Low-Voltage Actuators
MIniature Piezo Stack Actuator
  • Ceramic Encapsulation for Extended Lifetime
  • Smallest Multilayer Piezo: from 2x2x2 mm
  • Low-Voltage, High Curie Temperature
  • Ideal for Dynamic Operation
  • Sub-Millisecond Response / Sub-Nanometer Resolution
  • UHV Compatible to 10-9 hPa
  • Superior Lifetime

PDF Datasheet
PDF for Miniature Piezo Stack Actuator
Specs/Order Info
PL022 · PL033 · PL055 Mini Piezo Chip Stacks
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P-007 – P-056 PICA™-Stack / High-Force Stacks
High-Load  Piezo Stack Actuator
  • High Load Capacity to 100 kN
  • High Force Generation to 80 kN
  • Large Cross Sections to 56 mm Diameter
  • Variety of Shapes
  • Extreme Reliability >1000,000,000 Cycles
  • Proven and Flexible Design
  • Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
  • Vacuum-Compatible Versions

PDF Datasheet
PDF for High-Load  Piezo Stack Actuator
Specs/Order Info
P-007 – P-056 High Force Piezo Stacks
P-871 Closed-Loop, Multilayer Piezo Bender Transducer, High-Deflection & Low-Voltage
Piezo Bender Actuator
  • Closed-Loop = Higher Accuracy
  • Nanometer-Range Resolution
  • Deflection up to 1.6 mm
  • Ceramic Insulation for Extended Lifetime
  • Ideal for Scanning Applications
  • Vacuum-Compatible Versions
  • Low Voltage
  • Mounting Hardware Included
  • Special Controllers / Drivers Available

PDF Datasheet
PDF for Piezo Bender Actuator
Specs/Order Info
P-871 Piezo Bender Transducer
P-876 DuraAct™ Flexible Piezo Patch Transducer
Piezo Patch Transducer
  • Actuator, Sensor or Energy Source
  • Highly Formable Ceramics
  • Can be Applied to Curved Surfaces
  • Customized Solutions on Request
  • Cost-Effective

PDF Datasheet
PDF for Piezo Patch Transducer
Specs/Order Info
P-876 Piezo Patch Transducer
Planar AFM Piezo Scanners Stages and ControllersAFM Piezo Scanner Brochure
Piezo Actuator Products:
Piezo Actuator ProductsLinear Stepper Motors Piezo ActuatorPiezo Actuators Steering MirrorsSteering Mirrors Steering StagesScanning Stages Piezo Controllers Piezo Controllers Patch TransducersPatch Transducers