Piezo - Piezo Mechanisms & Piezo Mechanic Systems by PI Physik Instrumente



Piezo Mechanisms & Piezo Mechanic Systems for Precision Motion Applications (Mechatronics)

Piezo mechanisms can provide very fast and precise motion. PI and PI Ceramic are the leading manufacturers of mechatronic systems such as piezo actuators and pzt transducers for motion control, nano positioning and micropositioning applications in industries such as: Semiconductors; Biotechnology and Medicine; Lasers, Optics, Microscopy; Aerospace Engineering;Precision Machining; Astronomy and Microsystems Technology.

PI also provides value added manufacturing and custom assembly of piezo components and piezo systems for OEMs.

Piezo Mechanisms Catalog

Piezo Products for Motion Control:

Piezo Stages, Flexure Guided

Linear Piezo Motors

Piezo Actuators

Piezo Tip/Tilt Steering Mirrors

Piezo Controllers

DuraAct™ Patch Transducers

Piezo Catalogs / Papers
Piezo Mechanisms & Controllers
Vacuum & Non Magnetic Positioners
Piezo Materials & Components
Piezo Flexure Actuators
Piezo Stages for AFM
Piezo Amplifiers, Drivers
Energy Harvesting
Piezo Reliability Paper

Piezo University: Designing with Piezoelectrics

Different Types of Piezo Mechanisms Solve Different Problems

Not all piezo actuators and motors are created equal. There are a large variety of different designs optimized for different applications, from extremely high force or microsecond response, to long travel ranges in the millimeter and centimeter range.


Direct Piezo Actuators: Z-Stacks, Shear (X, XY) Highest Force Fastest Response Travel Ranges 2-100 µm		Piezo Flexure Lever Actuators Flexure Guiding System Response <1 msec Travel to 2 mm, Compact

Ultrasonic Linear Motors Long Travel (10s of millimeters) Fast: 350 mm/sec Low Profile, Self Locking		PiezoWalk® Linear Motors High Force (2 kg to 80 kg) Compact, Self Locking Long Travel (10s of millimeters)
All: Sterile, Low Power, No Lubricants, Non- Magnetic, Vacuum Compatible; High Resolution: Sub-Nanometer to Sub-Micron

Piezo Effect /Different Types of Piezo Actuators / Video

Piezoelectric Actuator Tutorial
		Piezo is derived from the Greek word piezein (to squeeze). It is quite often misspelled peizo. Piezoelectric actuators offer a solution to positioning tasks that require the highest accuracy, speed and resolution. Examples given in this tutorial indicate a selection of the many applications common today. The relentless push for more accuracy and speed-whether in biotechnology / nanotechnology, the miniaturization of microelectronics, fiber optics or data storage devices-drives both the application and the further development of piezo technology. First Piezo Physics App for iPhone, iPad & Android Blog: More Information on the Piezo Physics App Tutorial: Piezoelectrics in Nanopositioning, Designing with Piezoelectric Actuators Features and Applications Fundamentals of Piezomechanics, Actuators and Sensors Fundamentals of Piezoelectric Actuators Control of Piezo Actuators and Stages Parallel and Serial Kinematics, PMN Compared to PZT White Paper: Piezo Technology in Active Vibration Cancellation

Piezoelectric / Motorized Actuator Solutions for Motion Control Applications


Nano-Precision Piezo Actuators Forces to 100 kN Sub-Nano meter Resolution Fast Response (to µsec -Range) Extreme Lifetime	Ultrasonic Piezo Linear Actuators / Motors Non Magnetic Velocity to 600 mm/s Unlimited Travel Range Forces to 30 N Resolution to 50 Nanometer	Flexible Piezoelectric Patch Transducers Actuator, Sensor, Energy Source Highly Formable Ceramics Can be Applied to Curved Surfaces Cost-Effective	Piezo Stepper Linear Motors Non Magnetic Forces to 600 N <1 nm Resolution Auto-Locking PiezoWalk® Principle Travel to 20 mm	Flexure-Guided Piezo Actuators Sub-Nanometer Resolution Fast Response (msec -Range) Excellent Guiding Precision Travel to 1 mm

Piezo Stepping Linear Actuators & Motors (NEXACT® / NEXLINE®)
N-310 NEXACT^® OEM Miniature Linear Motor/Actuator
		20 mm Standard Travel Range, Flexible Choice of the Runner Length Compact and Cost-Effective Design 0.03 nm Resolution**To 10 N Push/Pull Force Low Operating Voltage Self-Locking at Rest, No Head Dissipation, Nanometer Stability Non-Magnetic and Vacuum-Compatible Working Principle

PDF Datasheet

Specs/Order Info
N-310 Miniature Piezo Linear Motor

N-381 NEXACT^® Linear Actuator, Manipulator, Piezo Stepper
		Travel Range 30 mm Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution Very High Acceleration, e.g. for Cell Penetration Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution** Up to 10 N Force Generation Self-Locking at Rest, no Heat Generation Smooth Motion, no Closed-Loop Jitter Vacuum-Compatible and Non-Magnetic Versions

PDF Datasheet

Specs/Order Info
N-381 Piezo Stepper Manipulator

NEXLINE^® Nanopositioning Actuators

N-111 NEXLINE^®OEM High Force Piezo Motor with Long Travel
		Winner of the SEMI Technology Innovation Showcase Award 3 mm Travel Range <0.1 Nanometer Resolution Active Force Generation to 30 N >50 N Holding Force Self-Locking Non Magnetic Option

PDF Datasheet

PDF for Linear Actuator with Long Travel

Specs/Order Info
N-111 High Force Piezo Motor

N-216 NEXLINE^® High-Load Piezo Nanopositioning Actuator
		Travel Range 20 mm Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop Up to 800 N Holding Force Self-Locking at Rest Non-Magnetic and Vacuum-Compatible Working Principle Cleanroom Compatible

PDF Datasheet

PDF for High-Load Piezo Nanopositioning Actuator

Specs/Order Info
N-216 High-Load Piezo Nanopositioning Actuator

Ultrasonic Linear Actuators / Motors

PILine® RodDrive PiezoMotor Actuators
		Drive-Component for Integration into Precision Positioning Systems Flexible Choice of Travel Ranges to Several 100 mm Flexible Choice of Push/Pull Forces to Several 10 Newton Minimum Incremental Motion to 50 Nano meters Velocity to 400 mm/s Self-Locking Non Magnetic Option

	PDF Datasheet		Specs/Order Info RodDrive Piezo Actuator
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M-272 Linear Ultrasonic Shaft Motor
		Easy Integration: Comes with Integrated Linear Encoder & Guiding System High Speed to 200 mm/sec High Force to 8 N Very Stable: Self Locking with no Heat Generation

PDF Datasheet

PDF for Piezo Shaft Linear Ultrasonic Motor

Specs/Order Info
Linear Ultrasonic Shaft Motor

U-164 PILine^® Ultrasonic Piezo Linear Motor
		Compact Patented Design: high speed & force Easy Mounting Max. Velocity 500 mm/s Acceleration up to 5 g Resolution 50 nm Self-Locking No Electro-Magnetic Fields

PDF Datasheet

Specs/Order Info
U-164 Ultrasonic Piezo Linear Motor

M-661 / M-662 PILine^® Mini Linear Stage with Ultrasonic Piezo Motor
		20 mm Travel Range Velocity to 500 mm/s Acceleration to 20 g Resolution to 50 Nanometers Self-Locking XY-Combinations Available 20000 h MTBF Vacuum Versions to 10-⁷ hPa Non Magnetic Option

	PDF Datasheet		Specs/Order Info Mini Linear Stage with Piezo Motor
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M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
		Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder 20 mm Travel To 500 mm/s fast Acceleration to 20 g Resolution to 100 Nanometer Direct-Metrology: Linear Encoder AutoLocking Design XY-Stage Combinations 20000 h MTBF Vacuum Versions Available Non Magnetic Option

PDF Datasheet

Specs/Order Info
M-663 Closed-Loop Translation Stages

Flexure Piezo Actuators (Long Travel, Fast Response, Guided Motion)
P-601 PiezoMove® Piezo Flexure Z-Actuator
		Flexure Guidance for Frictionless, Ultra-Straight Motion Travel Ranges to 480 Microns Resolution to 0.2 Nanometer High Stiffness & Dynamics Long Life PICMA® Multilayer Piezo Ceramics Open and Closed-Loop Versions Ideal for OEM Applications

PDF Datasheet

Specs/Order Info
P-601 Piezo Flexure Z-Actuator

P-602 High Force Piezo Flexure Actuator
		Backlash-Free, Frictionless Flexure Guides for Straight Motion Integrated Motion Amplifier for Travel Ranges to 1 mm High Dynamics and Stiffness, Forces to 400 N, Long Life PICMA® Multilayer Piezo Ceramics Position Sensor Option Custom Designs: Larger Travel, Faster Response, Non-Magnetic OEM-Applications in Adaptronics, Biotechnology or Microfluidics

	PDF Datasheet		Specs/Order Info P-602 High Force Piezo Flexure Actuator
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P-603 Low Cost Piezo Flexure Actuator
		Zero Backlash, Frictionless, High-Precision Flexure Guiding System Travel Ranges to 500 µm Cost-Effective & Long Life PICMA® Multilayer Piezo Ceramics Position Sensor Option Custom Designs: Larger Travel, Faster Response, Non-Magnetic OEM-Applications in Adaptronics, Biotechnology or Microfluidics

	PDF Datasheet		Specs/Order Info P-603 Low Cost Piezo Flexure Actuator
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P-753 LISA Closed-Loop Piezoelectric Nano Positioning Stages / Actuators with Direct Metrology
		Unique Design: Both Stage and Actuator Frictionless Precision Flexure Guiding System 0.05 Nano meter Resolution Direct Metrology with Capacitive Sensors for Highest Precision Ultra-Fast Response, Very Compact Long Life PICMA® Multilayer Piezo Ceramics ID-Chip for Auto Calibrate Function Vacuum Versions Available

PDF Datasheet

PDF for High PRecision Piezo Flexure Actuator

Specs/Order Info
P-753 Piezoelectric NanoPositioning Stage

Direct Piezo Linear Actuators & Piezo Benders
P-882 – P-888 PICMA® High-Performance Multilayer Piezo Stacks
		Award-Winning Low-Voltage Technology Superior Lifetime Under Extreme Conditions Very Large Operating-Temperature Range High Humidity Resistance Excellent Temperature Stability High Stiffness UHV Compatible to 10-⁹ hPa Sub-Millisecond Response & Sub-Nano meter Resolution

	PDF Datasheet		Specs/Order Info P-882 – P-888 High-Performance Piezo Stacks
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P-212 · P-216 & P-225 · P-235 Preloaded Encased PICA™ Power Piezo Stacks
		Pushing Force to 4,500 N or 30,000 N Travel Range to 180 µm Pulling Force to 500 N or 3,500 N Sub-millisecond Response Sub-Nanometer Resolution Options: Vacuum, High- and Low-Temperature

	P-212 · P-216 PDF		Specs/Order Info / Order Info P-212 · P-216 Preloaded Encased Piezo Stacks
	P-225 · P-235 PDF		Specs/Order Info / Order Info P-225 · P-235 Preloaded Encased Piezo Stacks

P-840 Preloaded Low-Voltage Piezo Stack Linear Actuators (LVPZT)
		Displacement to 90 µm Pushing Forces to 1000 Newton Preloaded for Tensile Forces to 50 N Sub-millisecondec Response Sub-Nano meter Resolution Options: Ball Tip, Vacuum Versions

	PDF Datasheet		Specs/Order Info P-840 · P-841 Piezo Stack Linear Actuators
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PICMA® Chip Piezo Stacks: Miniature Low-Voltage Actuators
		Ceramic Encapsulation for Extended Lifetime Smallest Multilayer Piezo: from 2x2x2 mm Low-Voltage, High Curie Temperature Ideal for Dynamic Operation Sub-Millisecond Response / Sub-Nanometer Resolution UHV Compatible to 10^-9 hPa Superior Lifetime

	PDF Datasheet		Specs/Order Info PL022 · PL033 · PL055 Mini Piezo Chip Stacks
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P-007 – P-056 PICA™-Stack / High-Force Stacks
		High Load Capacity to 100 kN High Force Generation to 80 kN Large Cross Sections to 56 mm Diameter Variety of Shapes Extreme Reliability >1000,000,000 Cycles Proven and Flexible Design Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time Vacuum-Compatible Versions

PDF Datasheet

Specs/Order Info
P-007 – P-056 High Force Piezo Stacks

P-871 Closed-Loop, Multilayer Piezo Bender Transducer, High-Deflection & Low-Voltage
	Closed-Loop = Higher Accuracy Nanometer-Range Resolution Deflection up to 1.6 mm Ceramic Insulation for Extended Lifetime Ideal for Scanning Applications Vacuum-Compatible Versions Low Voltage Mounting Hardware Included Special Controllers / Drivers Available

PDF Datasheet

Specs/Order Info
P-871 Piezo Bender Transducer

P-876 DuraAct™ Flexible Piezo Patch Transducer
		Actuator, Sensor or Energy Source Highly Formable Ceramics Can be Applied to Curved Surfaces Customized Solutions on Request Cost-Effective