Piezo Mechanisms & Piezo Mechanic Systems
for High Tech Applications (Mechatronics)



PI and PI Ceramic are the leading manufacturers of mechatronic systems such as piezo actuators and pzt transducers for motion control, nano positioning and micropositioning applications in industries such as: Semiconductors; Biotechnology and Medicine; Lasers, Optics, Microscopy; Aerospace Engineering; Precision Machining; Astronomy and Microsystems Technology. Piezo Mechanisms Catalog Piezo Products for Motion Control:
Linear Piezo Motors
Piezo Actuators
Steering Mirrors
Piezo Flexure Stages
Piezo Controllers
DuraAct™ Patch Transducers

Piezo Catalogs / Papers
Piezo Mechanisms & Controllers
Vacuum & Non Magnetic Positioners
Piezo Materials & Components
Piezo Flexure Actuators
Piezo Stages for AFM
Piezo Amplifiers, Drivers
Energy Harvesting
Piezo Reliability Paper

Reasons for Choosing PI    Piezo University: Designing with Piezoelectrics     Groundbreaking Technologies

Different Types of Piezo Mechanisms Solve Different Problems


Direct Piezo Actuators: Z-Stacks, Shear (X, XY)

  • Highest Force
  • Fastest Response
  • Travel Ranges 2-100 µm
Piezo Flexure Lever Actuators

  • Flexure Guiding System
  • Response <1 msec
  • Travel to 2 mm, Compact


Ultrasonic Linear Motors

  • Long Travel (10s of millimeters)
  • Fast: 350 mm/sec
  • Low Profile, Self Locking
PiezoWalk® Linear Motors

  • High Force (2 kg to 80 kg)
  • Compact, Self Locking
  • Long Travel (10s of millimeters)

All: Sterile, Low Power, No Lubricants, Non- Magnetic, Vacuum Compatible; High Resolution:
Sub-Nanometer to Sub-Micron



Video: Piezo Effect /
Different Types of Piezo Actuatos



Piezoelectric Actuator Tutorial

Piezo is derived from the Greek word piezein (to squeeze). It is quite often misspelled peizo. Piezoelectric actuators offer a solution to positioning tasks that require the highest accuracy, speed and resolution.

Examples given in this tutorial indicate a selection of the many applications common today. The relentless push for more accuracy and speed-whether in biotechnology / nanotechnology, the miniaturization of microelectronics, fiber optics or data storage devices-drives both the application and the further development of piezo technology.

Tutorial: Piezoelectrics in Nanopositioning,
    Designing with Piezoelectric Actuators

Features and Applications
Fundamentals of Piezomechanics, Actuators and Sensors
Fundamentals of Piezoelectric Actuators
Control of Piezo Actuators and Stages
Parallel and Serial Kinematics, PMN Compared to PZT
White Paper: Piezo Technology in
    Active Vibration Cancellation

Piezoelectric / Motorized Actuator Solutions for Motion Control Applications


Nano-Precision Piezo Actuators


Forces to 100 kN
Sub-Nano meter
   Resolution
Fast Response (to
   µsec -Range)
Extreme Lifetime

Ultrasonic Piezo Linear
Actuators / Motors


Non Magnetic
Velocity to 600 mm/s
Unlimited Travel
   Range
Forces to 30 N
Resolution to 50 Nanometer

Flexible Piezoelectric
Patch Transducers


Actuator, Sensor,
   Energy Source
Highly Formable
   Ceramics
Can be Applied to
   Curved Surfaces
Cost-Effective

Piezo Stepper Linear Motors


Non Magnetic
Forces to 600 N
<0.1 nm Resolution
Auto-Locking PiezoWalk® Principle
Travel to 20 mm

Flexure-Guided Piezo Actuators


Sub-Nanometer
   Resolution
Fast Response
   (msec -Range)
Excellent Guiding
   Precision
Travel to 1 mm

Piezo Stepping Linear Actuators & Motors (NEXACT® / NEXLINE®)

N-310 NEXACT® OEM Miniature Linear Motor/Actuator
  • 20 mm Standard Travel Range, Flexible Choice of the Runner Length
  • Compact and Cost-Effective Design
  • 0.03 nm Resolution**To 10 N Push/Pull Force
  • Low Operating Voltage
  • Self-Locking at Rest, No Head Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle

PDF Files
HTML Catalog Files

N-310
N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper
  • Travel Range 30 mm Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self-Locking at Rest, no Heat Generation Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions

PDF Files
HTML Catalog Files

N-381

NEXLINE® Nanopositioning Actuators


N-111 NEXLINE®OEM Linear Actuator with Long Travel
  • Winner of the SEMI Technology Innovation Showcase Award
  • 3 mm Travel Range
  • <0.1 Nanometer Resolution
  • Active Force Generation to 30 N
  • >50 N Holding Force Self-Locking
  • Non Magnetic Option

PDF Files
HTML Catalog Files

N-111
N-216 NEXLINE® High-Load Piezo Nanopositioning Actuator
  • Travel Range 20 mm
  • Resolutionto 0.03 nm
  • Open-Loop, 5 nm Closed-Loop Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible

PDF Files
HTML Catalog Files

N-216

Ultrasonic Linear Actuators / Motors


PILine® RodDrive PiezoMotor Actuators
  • Drive-Component for Integration into Precision Positioning Systems
  • Flexible Choice of Travel Ranges to Several 100 mm
  • Flexible Choice of Push/Pull Forces to Several 10 Newton
  • Minimum Incremental Motion to 50 Nano meters
  • Velocity to 400 mm/s
  • Self-Locking
  • Non Magnetic Option

PDF Files
Online Catalog

M-674
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M-272 Linear Ultrasonic Shaft Motor
  • Easy Integration: Comes with Integrated Linear Encoder & Guiding System
  • High Speed to 200 mm/sec
  • High Force to 8 N
  • Very Stable: Self Locking with no Heat Generation

PDF Files
Online Datasheet / Order Info

M-272
U-164 PILine® Ultrasonic Piezo Linear Motor
  • Compact Patented Design: high speed & force
  • Easy Mounting
  • Max. Velocity 500 mm/s
  • Acceleration up to 5 g
  • Resolution 50 nm
  • Self-Locking
  • No Electro-Magnetic Fields

PDF Files
Online Datasheet / Order Info

U-164
P-661 PILine® Miniature Ultrasonic Piezo Linear Motor
  • Patented Principle Features Very Compact Dimensions
  • Velocity to 600 mm/s
  • Acceleration to 15 g
  • Minimum Incremental Motion to 50 Nano meters
  • Self-Locking to 1.5 Newton
  • 20000 h MTBF
  • Non Magnetic Option

PDF Files
Online Catalog

P-661
M-661 / M-662 PILine® Mini Linear Stage with Ultrasonic Piezo Motor
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometers
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
  • Non Magnetic Option

PDF Files
Online Datasheet / Order Info

M-661 - M-662
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M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel
  • To 500 mm/s fast
  • Acceleration to 20 g
  • Resolution to 100 Nanometer
  • Direct-Metrology: Linear Encoder
  • AutoLocking Design
  • XY-Stage Combinations
  • 20000 h MTBF
  • Vacuum Versions Available
  • Non Magnetic Option

PDF Files
Online Datasheet / Order Info

M-663

Flexure Piezo Actuators (Long Travel, Fast Response, Guided Motion)



P-601 PiezoMove® Piezo Flexure Z-Actuator
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Microns
  • Resolution to 0.2 Nanometer
  • High Stiffness & Dynamics
  • Long Life PICMA® Multilayer Piezo Ceramics
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications

PDF Files
Online Datasheet / Order Info

P-601
P-602 High Force Piezo Flexure Actuator
  • Backlash-Free, Frictionless Flexure Guides for Straight Motion
  • Integrated Motion Amplifier for Travel Ranges to 1 mm
  • High Dynamics and Stiffness, Forces to 400 N,
  • Long Life PICMA® Multilayer Piezo Ceramics
  • Position Sensor Option
  • Custom Designs: Larger Travel, Faster Response, Non-Magnetic
  • OEM-Applications in Adaptronics, Biotechnology or Microfluidics

PDF Files
Online Datasheet / Order Info

P-602
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P-603 Low Cost Piezo Flexure Actuator
  • Zero Backlash, Frictionless, High-Precision Flexure Guiding System Travel Ranges to 500 µm
  • Cost-Effective & Long Life PICMA® Multilayer Piezo Ceramics
  • Position Sensor Option
  • Custom Designs: Larger Travel, Faster Response, Non-Magnetic
  • OEM-Applications in Adaptronics, Biotechnology or Microfluidics

PDF Files
Online Datasheet / Order Info

P-603
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P-753 LISA Piezoelectric Nano Automation® Stages / Actuators with Direct Metrology
  • Unique Design: Both Stage and Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 Nano meter Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • Long Life PICMA® Multilayer Piezo Ceramics
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available

PDF Files
Online Datasheet / Order Info

P-753

Direct Piezo Linear Actuators & Piezo Benders



P-882 – P-888 PICMA® High-Performance Multilayer Piezo Stacks
  • Award-Winning Low-Voltage Technology
  • Superior Lifetime Under Extreme Conditions
  • Very Large Operating-Temperature Range
  • High Humidity Resistance
  • Excellent Temperature Stability
  • High Stiffness
  • UHV Compatible to 10-9 hPa
  • Sub-Millisecond Response & Sub-Nano meter Resolution

PDF Files
Online Datasheet / Order Info

P-882 – P-888
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P-212 · P-216 & P-225 · P-235 Preloaded Encased PICA™ Power Piezo Stacks
  • Pushing Force to 4,500 N or 30,000 N
  • Travel Range to 180 µm
  • Pulling Force to 500 N or 3,500 N
  • Sub-millisecond Response
  • Sub-Nanometer Resolution
  • Options: Vacuum, High- and Low-Temperature

P-212 · P-216 PDF
Online Datasheet / Order Info
P-212 · P-216
P-225 · P-235 PDF
Online Datasheet / Order Info
P-225 · P-235
P-840 Preloaded Low-Voltage Piezo Stack Linear Actuators (LVPZT)
  • Displacement to 90 µm
  • Pushing Forces to 1000 Newton
  • Preloaded for Tensile Forces to 50 N
  • Sub-millisecondec Response
  • Sub-Nano meter Resolution
  • Options: Ball Tip, Vacuum Versions

PDF Files
Online Datasheet / Order Info

P-840 · P-841
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PICMA® Chip Piezo Stacks: Miniature Low-Voltage Actuators
  • Ceramic Encapsulation for Extended Lifetime
  • Smallest Multilayer Piezo: from 2x2x2 mm
  • Low-Voltage, High Curie Temperature
  • Ideal for Dynamic Operation
  • Sub-Millisecond Response / Sub-Nanometer Resolution
  • UHV Compatible to 10-9 hPa
  • Superior Lifetime

PDF Files
Online Datasheet / Order Info

PL022 · PL033 · PL055
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P-007 – P-056 PICA™-Stack / High-Force Stacks
  • High Load Capacity to 100 kN
  • High Force Generation to 80 kN
  • Large Cross Sections to 56 mm Diameter
  • Variety of Shapes
  • Extreme Reliability >1000,000,000 Cycles
  • Proven and Flexible Design
  • Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
  • Vacuum-Compatible Versions

PDF Files
Online Datasheet / Order Info

P-007 – P-056
P-871 Closed-Loop, Multilayer Piezo Bender Transducer, High-Deflection & Low-Voltage
  • Closed-Loop = Higher Accuracy
  • Nanometer-Range Resolution
  • Deflection up to 1.6 mm
  • Ceramic Insulation for Extended Lifetime
  • Ideal for Scanning Applications
  • Vacuum-Compatible Versions
  • Low Voltage
  • Mounting Hardware Included
  • Special Controllers / Drivers Available

PDF Files
Online Datasheet / Order Info

P-871
P-876 DuraAct™ Flexible Piezo Patch Transducer
  • Actuator, Sensor or Energy Source
  • Highly Formable Ceramics
  • Can be Applied to Curved Surfaces
  • Customized Solutions on Request
  • Cost-Effective

PDF Files
Online Datasheet / Order Info

P-876
Planar AFM Piezo Scanners Stages and Controllers
Piezo Actuator Products:
Linear Stepper Motors Piezo Actuators Steering Mirrors Scanning Stages Piezo Controllers Patch Transducers